1700C CVD 3-zone Vacuum Tube Furnace With MFC Gas Mixer And Molecular Pump Unit

Product Overview

PT D80/1500/17/3 is a high-temperature, three-zone CVD high-vacuum tube furnace. OD80mm alumina tube, heating length 1500mm. Equips with molecular pump with vacuum level up to 10-5torr, 3 channels MFC precise controlled gas mixing. 304SS water cooling flanges with needle valves and gauge, multiple air inlets and outlets for various gases. It adopts a microprocessor-based self-tuning Yudian PID temperature control system with temperature control accuracy of +/-°C, MoSi2 rods heated, Max temperature can reach to 1700°C (1500°C under high vacuum). The 3-zone high vacuum tube furnace is mainly used for vacuum and atmospheric protection sintering, vacuum thin film coating, CVD experiments etc.

Main Features

• Tmax 1700℃
• 3 heating zone high vacuum, CVD tube furnace
• Dual steel structure, minium heat loss
• Molecular pump unit, max vacuum level up to 10-5 torr
• 3-channel MFC controlled gas mixer
• Fiber-insulated chamber with MoSi2 heating elements for maximum temperature stability and uniformity
• 304SS water cooling sealed flanges
• Digital PID controller with programmable 30 segments with accuracy of +/-1°C
• B type thermocouple
• ISO, CE

Safety Measures

• Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
• Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller’s manual) or when the thermocouple is broken or malfunctions.
• Power failure protection resumes furnace operation right after the point of failure when power is reestablished.
• Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot

Product Details

1700°C CVD 3 Zone Vacuum Tube Furnace with MFC Gas Mixer and Water Cooling Device

• PT D80/1500/17 is mainly composed of seven parts: furnace body, furnace tube, flange sealing accessories, gas supplying system, water cooling system, vacuum pumping system and temperature control system
• The furnace outer steel shell is processed with pickling and phosphating, environment powder coating on the surface, corrosion and oxidation resistance, built-in cooling fan, surface temperature Rt+45℃
• Exquisite appearance, ISO, CE compliance

Chamber profile for 1700°C CVD 3 zones high vacuum tube furnace

• High alumina ceramic insulation, CNC engraving, chamber walls coupling tightly, U type MoSi2 heator, temperature resistant up to 1800C
• Heating length 600mm, suitable for aluminua tube diameter 60mm. High alumina processing tube, temperature resistance up to 1700℃,The critical part of the heating zone inside the furnace tube is equipped with the ceramic tube plug, which can effectively prevent heat from escaping and reduce heat loss
• B type thermocouple

Water cooling flange, 1/4" pagoda gas nozzle, Molecular vacuum pump unit

• Equipped with SS304 water cooling flange set, sealed with high-temperature resistant fluorine rubber sealing rings
• The air inlet and outlet adopts G1/4-inch pagoda air nozzle, which can be connected to a PTFE pipe with an outer diameter of 8mm
• Connected molecular pump unit with KF25, make sure vacuum level reach to 10*-5mbar

HEATING PROGRAMS FOR 1700°C CVD HIGH TEMP 3 ZONES TUBE FURNACE

• Programmable 30 segments, heating rate 1-10C/min freely adjusted
• Good thermal insualtion, natural cooling, cooling down gently
• 7" touchscreen panel is optional, heating programs can be showed timely, and downloaded

Technical Specifications

Application Notes

• The processing tube pressure should be lower 0.02MPa
• Gas source should equip the pressure reducing valve
• Before filling reduction gases like H2, should pump the air out of the tube
• When filling gases from gas inlet in the tube, should make sure the gas outlet valve open

Size Comparison