Clean Room Wafer Storage Box With Chemical Resistance PFA Material
Product Description:
PFA Cassette / Teflon Cassette can be customized and designed according to customers' requests. These cassettes are capable of resisting strong acids, strong hydrofluoric acids, strong bases, and temperatures up to 200-220℃. They are primarily used for transporting wafers in the acid and base processes of semiconductor fabrication facilities.
With its ability to withstand harsh chemical environments and high temperatures, it ensures the safe and effective delivery of wafers during the fabrication process.
The use of these cassettes enhances the efficiency and reliability of wafer transportation within the fabrication factory, contributing to smoother production processes.
Features:
- Carrying semiconductor wafers
- Used in acid-base processes
- The product is resistant to high temperature, strong acid, strong fluoric acid, and strong alkali
- Can be used with additional Teflon handles
- Laser engraving and RFID can be customized
- Special Y-handle available as optional accessory
|
Material |
Degree of temperature resistance |
Property |
Application |
|
PFA Cassette |
200~220℃ |
Strong acid, strong hydrofluoric acid, strong base resistant |
For acid& base process |
|
PP Cassette |
40~60℃ |
Pros: Light weight, able to welding |
For general transfer process |
|
PC Cassette |
80~100℃ |
Light weight, able to welding |
|
|
PEI Cassette |
130~150℃ |
Wear resistant, anti-static |
Applications:
PFA and Teflon cassettes are commonly utilized as capacitors for wafers, serving as a dependable and stable foundation for wafer processing. These cassettes come in various configurations and sizes to cater to specific applications and the wafer sizes involved. Apart from their capacitor role, PFA and Teflon cassettes can also function as carriers for wafer processing, offering a secure and stable platform for managing wafers throughout different fabrication stages.
During wafer processing with PFA and Teflon cassettes, it is crucial to adhere to proper safety protocols. This includes donning suitable personal protective gear and handling the cassettes carefully to prevent any harm to the wafers or equipment.
Support and Services:
The Product Technical Support and Services for the Wafer Cassette Box include:
- Assistance with product installation and setup
- Troubleshooting and diagnosis of technical issues
- Maintenance and repair services
- Product training and user guidance
- Product customization and upgrades
- Warranty support and product documentation
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.