Alumina Ceramic Insulation Supports For Semiconductor Manufacturing Equipment And Vacuum Coating Chambers
Alumina Ceramic Insulation Supports For Semiconductor Manufacturing Equipment And Vacuum Coating Chambers
Product Introduction
The alumina ceramic insulating support ring is manufactured from high-purity (above 99%) alumina material, featuring exceptional electrical insulation properties, mechanical strength, and high-temperature resistance. This product maintains stable physical and chemical performance even in high-temperature, high-pressure, and corrosive environments, widely used for insulation support and positioning in power electronics, vacuum equipment, and other fields.
Primary Applications
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Electrical Equipment: High-voltage switches, insulators, circuit breakers
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Electronics Industry: Semiconductor manufacturing equipment, vacuum coating chambers
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New Energy: Fuel cell stacks, electrolyzer insulation components
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Vacuum Technology: High-vacuum system insulation supports
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High-Temperature Equipment: Kiln, heating device insulation structures
Key Advantages
✅ Ultra-High Insulation: Volume resistivity >10¹⁴Ω·cm (room temperature)
✅ High-Temperature Resistance: Continuous operating temperature up to 1600°C
✅ High Mechanical Strength: Compressive strength >2000MPa
✅ Precision Dimensions: Tolerance up to ±0.01mm
✅ Corrosion Resistance: Resists acid/alkali erosion (except hydrofluoric acid)
Technical Specifications
| Parameter | Specification |
|---|---|
| Material | 99% Al₂O₃ |
| Density | 3.8-3.9 g/cm³ |
| Flexural Strength | ≥350 MPa |
| Dielectric Strength | ≥15 kV/mm |
| Thermal Expansion Coefficient | 7.2×10⁻⁶/°C |
| Surface Roughness | Ra≤0.4μm |
| Operating Temperature Range | -50°C to 1600°C |
Manufacturing Process
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Raw Material Processing: Fine grinding of high-purity alumina powder
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Forming Process: Isostatic pressing/injection molding
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High-Temperature Sintering: 1700-1800°C atmosphere-protected sintering
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Precision Machining: CNC internal/external cylindrical grinding
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Laser Marking: Product identification and traceability
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Inspection & Packaging: Dimensional inspection + insulation testing
Installation Guidelines
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Clean contact surfaces before installation to remove oil and contaminants
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Avoid edge impacts to prevent brittle fracture
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For high-temperature environments, recommend gradual temperature installation
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Regularly check insulation resistance (suggest every 6 months)
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Consider thermal expansion differences when mating with metal components
After-Sales Service Commitment
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Free technical consultation and selection support
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48-hour response for non-human damage cases
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Custom development based on drawings
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Regular maintenance manual updates
Frequently Asked Questions (FAQ)
Q: What is the maximum withstand voltage?
A: Standard products 15kV/mm, specially designed up to 30kV/mm
Q: Can complex-shaped structures be manufactured?
A: Custom complex shapes available, minimum wall thickness ≥1mm
Q: How to test insulation performance?
A: Megohmmeter testing recommended (test voltage 1000V DC)
Q: How to fix with metal components?
A: Recommend high-temperature adhesive bonding or mechanical clamping
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.