Silicon Carbide Ceramics Offering Thermal Shock Resistance And High Temperature Stability For In Semiconductor Crystal Growth Furnaces
Silicon Carbide (SiC) Precision Ceramics are high-performance industrial ceramic materials manufactured using high-purity SiC powder (purity ≥ 98%) through advanced forming and high-temperature sintering processes. These materials provide exceptional thermal shock resistance, high temperature stability, and strong corrosion resistance, making them essential components for high-end industrial thermal equipment operating in extreme conditions from 1600-1900°C.
- High-Temperature Furnace Linings: Suitable for SiC sintering furnaces, vacuum/atmosphere sintering furnaces, glass melting kilns, and hazardous waste incinerators, providing high-temperature and corrosion-resistant inner lining protection
- Thermocouple Protection Tubes: Used in semiconductor crystal growth furnaces, metal melting furnaces, and cemented carbide sintering furnaces, ensuring accurate operation of temperature measurement elements under reducing/inert atmospheres
- High-Temperature Resistance: Decomposition temperature >2500°C under atmospheric pressure; flexural strength at 1400°C remains over 70% of room temperature strength
- Thermal Shock Resistance: Thermal expansion coefficient of 4.3-4.5×10⁻⁶/K, capable of withstanding sudden temperature fluctuations >500°C
- Corrosion and Wear Resistance: Resistant to strong acids (except hydrofluoric acid), molten metals, and slag erosion; hardness ranges from 2400-2600 kg/mm²
- Precision and Stability: High forming accuracy; pressureless sintered products achieve density ≥98%; excellent thermal conductivity (104-200 W/m*K)
| Item | Indicator |
|---|---|
| SiC Content | ≥98% |
| Density | 3.02-3.10 g/cm³ |
| Maximum Operating Temperature | 1900°C |
| Thermal Expansion Coefficient (25°C) | 4.3×10⁻⁶/K |
| Flexural Strength (Room Temperature) | ≥395 MPa |
| Hardness (HV) | 2400-2600 kg/mm² |
| Porosity | ≤0.1 vol% (Reaction Sintered) |
Raw Material Pretreatment (Purification → Ball Milling) → Forming (Isostatic Pressing / Slip Casting / Extrusion) → High-Temperature Sintering (1400-2200°C) → Precision Machining (Grinding → Polishing) → Performance Testing (Strength / Corrosion Resistance Testing) → Finished Product Packaging
- Clean contact surfaces before installation to ensure no impurities
- Avoid sudden cooling or heating; heating/cooling rates should be ≤5°C/min
- Preheat to 80°C and maintain for 2 hours before use in low-temperature environments (<15°C)
- Keep away from strongly corrosive media such as hydrofluoric acid
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