High Purity Alumina Ceramic Shield Rings For Semiconductor Etching Equipment | Vacuum Chamber Protection Rings With Custom Sizes And High Temperature Resistance
Price:
as negotiated and agreed
MOQ:
As Negotiated and Agreed
Delivery Time:
depend on the actual product
Brand:
Dayoo
Product Description
High Purity Alumina Ceramic Shield Rings
Alumina ceramic shield rings are high-performance annular protective components manufactured from high-purity alumina (Al₂O₃ content 95%-99.99%). These ivory white or beige-yellow components feature dense texture and high surface finish, designed to provide protection, isolation, support, and insulation functions in various equipment applications.
Primary Applications
| Application Field | Specific Uses |
|---|---|
| Semiconductor Manufacturing | Etching equipment chamber protection, plasma bombardment barrier, deposition process mask |
| Vacuum Coating Equipment | Protective ring surrounding heaters and susceptors, sputtering process anti-deposition shield |
| Electronics and Electrical | High-voltage insulation shield rings, electronic component protective sleeves, vacuum feedthrough insulators |
| Chemical and Metallurgical | Reactor liner protection, high-temperature furnace supports, corrosion-resistant pipe sleeves |
| Mechanical Seals | Pump and valve seal shield rings, bearing protection rings, wear-resistant component bushings |
Core Advantages
- Excellent protective performance against plasma bombardment, chemical corrosion, and mechanical wear
- Ultra-high hardness and wear resistance (Mohs hardness 9)
- Excellent thermal stability with maximum operating temperature up to 1750-1800℃
- Outstanding electrical insulation (volume resistivity >1×10¹⁴ Ω*cm)
- Excellent chemical stability resistant to acid and alkali corrosion
- Precise dimensional control with micron-level tolerances
- Non-toxic and environmentally friendly material
Technical Specifications
| Parameter | Typical Value/Range | Remarks |
|---|---|---|
| Alumina Content | 95% - 99.99% | Customizable according to requirements |
| Bulk Density | 3.64 - 3.98 g/cm³ | Increases with purity |
| Flexural Strength | 310 - 380 MPa | Up to 500MPa or more |
| Compressive Strength | 2550 - 3500 MPa | Extremely strong load-bearing capacity |
| Hardness | 14 - 30 GPa (≈1440-3060 kg/mm²) | Increases with purity |
| Dielectric Strength | 16.9 - 24 kV/mm | Excellent electrical safety performance |
| Volume Resistivity | >1×10¹⁴ Ω*cm | Extremely high at room temperature |
| Thermal Expansion Coefficient | 7.2 - 8.4 ×10⁻⁶ /℃ (20-1000℃) | Good dimensional stability |
| Thermal Conductivity | 32 - 42 W/m*K | Increases with purity |
| Maximum Operating Temperature | 1600 - 1800 ℃ | Under no-load conditions |
| Thermal Shock Resistance | 220 - 320 ℃ | Withstands rapid temperature changes |
| Water Absorption | 0% | Fully dense, good airtightness |
| External Dimensions | OD 50-500mm, Thickness 5-50mm | Customizable according to drawings |
Manufacturing Process
- Raw Material Preparation: High-purity alumina powder ball-milling and mixing
- Molding Process: Dry pressing, isostatic pressing, or hot pressing casting
- Green Body Machining: Trimming after molding with machining allowance
- High-Temperature Sintering: Pressureless sintering at 1600-1700℃
- Precision Machining: Grinding and lapping using diamond abrasives
- Quality Inspection: Full dimensional and performance testing
- Cleaning and Packaging: Vacuum or cleanroom packaging
Installation & Usage Guidelines
Installation Precautions:
- Confirm installation orientation and positioning surfaces
- Perform trial assembly before formal installation
- Use soft pads or gloves when handling
- Ensure clean contact surfaces free of particles
- Consider shrink fit assembly for interference fits
After-Sales Service
- Customization service for dimensions, purity, and tolerances
- Professional technical consultation and design guidance
- 100% inspection before shipment with material reports
- 24-hour response to customer issues
- Strict batch-to-batch consistency control
- Small batch support for R&D and trial production
Frequently Asked Questions
Q1: What is the difference between alumina ceramic shield rings and ordinary ceramic rings?
A: Shield rings are specifically designed for protection functions with precise positioning surfaces, step structures, and strictly controlled fit dimensions to ensure accurate resetting with each replacement.
Q2: What temperature can the product withstand? How is its thermal shock resistance?
A: Maximum operating temperature reaches 1750-1800℃ for high-purity alumina. Thermal shock resistance is approximately 220-320℃, capable of withstanding thermal shock tests with 500℃ temperature differences.
Q3: What level of dimensional accuracy can the shield rings achieve?
A: Standard products achieve outer and inner diameter tolerances of ±0.05mm. Precision grinding can achieve tolerances up to ±0.01mm, with concentricity and parallelism controlled within 0.02mm.
Q4: Are ceramic shield rings easy to break? What should be noted during installation?
A: Alumina ceramics have high hardness but some brittleness. Avoid hammering, dropping, or forced hammering during installation. Use shrink fit assembly or flexible gaskets, and wear gloves when handling.
Q5: Can shield rings be reused after cleaning?
A: Yes, as long as there are no cracks or chipping on the surface. Inspect critical dimensions and surface condition after each cleaning cycle.
Q6: Do you provide samples for testing? What is the minimum order quantity?
A: Small batch samples are available for testing and verification. Minimum order quantities for batch orders are negotiable based on product size, with special support for R&D requirements.
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Dayoo Advanced Ceramic Co.,Ltd
Location
No. 6, Shuangjin Street, Qiubin Industrial City, Qiubin Street, Wucheng District, Jinhua, Zhejiang
Contact Person
Lu