Accurate and Non-Destructive Film Thickness Measurement Fiber Optic Spectrometer Quantum Efficiency 83% 232nm SNR 1000 1
| Attribute | Value |
|---|---|
| Spectral Range | 200nm - 1100nm |
| Effective pixels | 1024*122 |
| Quantum Efficiency | QE92%peak@650nm, 83%@232nm |
| SNR | 1000:1 |
Thin film thickness monitoring forms the backbone of quality control in semiconductor and display manufacturing. Photoelectric instruments provide the ideal solution—combining precision with preservation of delicate layers. Through intelligent optical diagnostics, industries gain tools for continuous process refinement and breakthrough developments.
The JINSP SR100Q spectrometer is integrated with the Hamamatsu S7031, a scientific-grade TE-cooled area array CCD chip. With a pixel size of up to 24*24μm and excellent quantum efficiency of up to 92%, it ensures high response in the ultraviolet band and effectively improves the sensitivity and SNR of weak signals. Furthermore, it can realize excellent spectrum signals, and stable and reliable performance based on the advanced high-resolution light path and low-noise, high-speed FPGA signal processing chip.
| Detector | ||
|---|---|---|
| Chip Type | Back-illuminated TE-cooled Hamamatsu S7031 | |
| Effective Pixel | 1024*122 | |
| Pixel Size | 24*24μm | |
| Sensing Area | 24.576*2.928mm | |
| Optical Parameters | ||
| Optical Design | F/4 cross-type | |
| Numerical Aperture | 0.13 | |
| Focal Length | 100mm | |
| Entrance Slit Width | 10μm,25μm,50μm,100μm,200μm (customizable) | |
| Fiber Interface | SMA905,free space | |
| Electrical Parameters | ||
| Integration Time | 8ms-3600s | |
| Data Output Interface | USB3.0,RS232,RS485,20pin connector | |
| ADC Bit Depth | 16-bit | |
| Power Supply | 5V | |
| Operating Current | <3.5A | |
| Physical Parameters | ||
| Operating Temperature | 10℃~40℃ | |
| Storage Temperature | -20℃~60℃ | |
| Operating Humidity | <90%RH (no condensation) | |
| Dimensions | 180mm*120mm*50mm | |
| Weight | 1.2kg | |
| Model | Spectral Range(nm) | Resolution(nm) | Slit(μm) |
|---|---|---|---|
| SR100Q-G21 | 200~950 | 6.8 | 200 |
| SR100Q-G22 | 350~1100 | 2.2 | 50 |
| 1.5 | 25 | ||
| 1.0 | 10 | ||
| SR100Q-G23 | 200~775 | 1.6 | 50 |
| SR100Q-G24 | 350~925 | 1.0 | 25 |
| 0.7 | 10 | ||
| SR100Q-G25 | 532~690(4400cm-1*) | 13cm-1 | 50 |
| SR100Q-G26 | 638~800(3200cm-1) | 10cm-1 | 25 |
| SR100Q-G27 | 785~1050(3200cm-1) | 11cm-1 | 50 |
- High quantum efficiency, 92%peak@650nm, 83%@232nm
- High SNR: Ultra-low dark noise under long integration time, SNR is as high as 1000:1
- Noise-free clear processing of weak signal in long exposure, strong adaption to environment
- Low-noise and high-speed circuit: USB3.0
Incident light from the fiber probe reflects at the film's top and bottom surfaces, generating interfering beams. The spectrometer analyzes their interference spectrum, enabling thickness (d) calculation through the extremum method (θ, n, and peak/trough data). Higher thickness tightens fringe spacing, while longer wavelengths expand it. Precise measurements require optimized spectral settings.
- Detect absorption, transmittance and reflection Spectrum
- Light source and laser wavelength characterization
- OEM product module: Fluorescence spectrum, Raman spectrum, etc.
JINSP Company Limited, abbreviated as "JINSP", is a professional supplier with over 17 years of experience in spectral detection technology products, including Raman, FT-IR, LIBS technologies, etc. After 17 years of technology accumulation, the company's core key technologies have reached the international leading position at the level, and the cumulative number of patent applications exceeded 200.
In addition to its main headquarters located in the bustling city of Beijing, JINSP has established a fully owned subsidiary manufacturing facility situated in the province of Jiangsu, China.
JINSP Company received ISO9001:2015, ISO14001:2015, and ISO45001:2018 certifications. JINSP can provide required certifications, such as certification by the Ministry of Public Security or National Institute of Metrology, Environmental Level Certification, IP Level Certification, CE Certification, Transport Identification Report, EU ECAC certification, German ICT Security Testing, etc.
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