Hydraulic Filter Support iron Epoxy Coated Mesh Low Carbon Steel
Hydraulic filter support epoxy coated mesh low carbon steel
Epoxy coated filter mesh Product introduction
Engineered with modified epoxy formulation and multi-layer composite filtration, specifically designed to resist highly corrosive agents (e.g., Hydrofluoric Acid/HF) in semiconductor fabrication. Integrates molecular-level sealing and acid-resistant materials to deliver leak-proof containment against acid vapors, particles, and chemical degradation in harsh wet processes.
Epoxy coated filter mesh core selling point
- Certified per ASTM D1308/F519; withstands long-term exposure to ≥49% HF solutions & mixed acid vapors
Material volume swelling <0.1%, eliminating seal failure from acid penetration - Complies with SEMI F57 ultra-pure fluid standards; metallic ion leaching ≤5ppb
Nanoscale internal polish (Ra≤0.4μm) suppresses particle adhesion & wafer contamination - Modular quick-disconnect ports enable seamless integration into FDA/UPW/Chemical delivery systems
Built-in differential pressure sensing slots for visual filter life alert
Epoxy coated filter mesh Application areas
- Wet Etch Tools: Wafer HF/HNO₃ tank exhaust filtration and pipeline sealing
- Chemical Mechanical Polishing: Acid-Resistant Filters for Slurry Delivery Systems
- Ultra-high-purity chemical supply : Valve manifold box (VMB) acid vapor barrier unit
- Exhaust gas treatment system : Acidic exhaust gas pre-treatment filter module
Epoxy coated filter mesh Technical parameters
| Acid Resistance | HF (49%), HCl (37%), H₂SO₄ (98%), HNO₃ (68%) |
| Operating Range | -30°C ~ 120°C / 0~10 bar (G) |
| Seal Integrity | Helium Leak Rate ≤1×10⁻⁹ mbar·L/sec |
| Filtration Grade | Main filter layer: 0.2μm PTFE |
| Wetted Materials | Modified epoxy resin |
Epoxy coated filter mesh Product details
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