High Purity Wafer Drying And Parts Cleaning Semiconductor Stainless Steel N2 Heater

Overview

For high purity wafer drying and parts cleaning, the Stainless Steel N2 Heater is suitable for nitrogen, CDA (Clean Dry Air) or other high purity, inert gases. Constructed with an electropolished 316L stainless steel housing, the housing’s passivated wetted surfaces ensures compatibility with most process fluids. Additional features include a compact design for reduced footprint and a replaceable heater element. It is also available in a variety of models ranging from 375 watts to 3,000 watts.

Built-In Safety

There are a number of safety features incorporated into the stainless N2 heater. For example, the heater features high limit and process thermocouples to regulate and maintain temperature. Furthermore, there is also a thermal cut-off sensor to prevent overheating, and an electrical ground wire. Finally, there is an additional option for the heater to feature a microprocessor-based temperature controller in a NEMA-rated external switching chassis.

Highlights

The stainless N2 heater comes in various sizes, ranging from 375 to 3,000 watts (dependent on customer voltage) and from 120 VAC to 240 VAC, 1-phase (dependent on wattage). Several units may also be used in-series for higher wattage and flow capacities. Ambient temperature is 200ºC (392º F), with a pressure of 60 PSIG at 200º C.