Warped Wafer Clamping Vacuum Chucks 150x150mm to 600x1000mm with ≥40KG Magnetic Force for Laser Scribing and Lithography
Price:
100
MOQ:
1
Delivery Time:
15 working days
Brand:
HIE
Product Description
Warped Wafer Clamping Vacuum Chucks
Advanced vacuum chucks specifically engineered for secure handling of warped semiconductor wafers during precision manufacturing processes including laser scribing and lithography.
Key Applications
- Laser scribing and dicing operations
- Photolithography and pattern transfer processes
- Semiconductor wafer processing and inspection
Technical Advantages
- Compensates for wafer warping up to 40KG magnetic attraction force
- Flexible membrane design conforms to warped surfaces
- Precision vacuum distribution across entire wafer surface
- High-strength alloy steel or ceramic composite construction
- Reduces wafer damage and improves manufacturing yield
Product Specifications
| Specification | Magnetic Attraction | Width (mm) | Length (mm) | Height (mm) | Weight (kg) |
|---|---|---|---|---|---|
| 150×150 | ≥40KG | 150 | 150 | 80 | 13.5 |
| 150×300 | ≥40KG | 150 | 300 | 80 | 27 |
| 150×350 | ≥40KG | 150 | 350 | 80 | 31.5 |
| 150×400 | ≥40KG | 150 | 400 | 80 | 36 |
| 200×200 | ≥40KG | 200 | 200 | 80 | 24 |
| 200×300 | ≥40KG | 200 | 300 | 80 | 36 |
| 200×400 | ≥40KG | 200 | 400 | 80 | 48 |
| 200×500 | ≥40KG | 200 | 500 | 80 | 60 |
| 250×500 | ≥40KG | 250 | 500 | 80 | 75 |
| 300×300 | ≥40KG | 300 | 300 | 80 | 54 |
| 300×400 | ≥40KG | 300 | 400 | 80 | 72 |
| 300×500 | ≥40KG | 300 | 500 | 80 | 90 |
| 300×600 | ≥40KG | 300 | 600 | 80 | 108 |
| 300×800 | ≥40KG | 300 | 800 | 80 | 144 |
| 400×400 | ≥40KG | 400 | 400 | 80 | 96 |
| 400×500 | ≥40KG | 400 | 500 | 80 | 120 |
| 400×600 | ≥40KG | 400 | 600 | 80 | 144 |
| 400×800 | ≥40KG | 400 | 800 | 80 | 192 |
| 500×500 | ≥40KG | 500 | 500 | 80 | 150 |
| 500×600 | ≥40KG | 500 | 600 | 80 | 180 |
| 500×800 | ≥40KG | 500 | 800 | 80 | 240 |
| 600×800 | ≥40KG | 600 | 800 | 80 | 288 |
| 600×1000 | ≥40KG | 600 | 1000 | 80 | 360 |
Construction Features
- High-strength alloy steel or ceramic composite base
- Precision-machined vacuum channels and ports
- Flexible membrane clamping system
- Adjustable support pins for severe warping
- Uniform vacuum distribution across warped surfaces
These vacuum chucks provide reliable performance in semiconductor manufacturing environments, ensuring precise wafer positioning and improved process yields in laser scribing and lithography applications.
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Company
Dongguan Hie Hardware Co., Ltd.
Location
Jinghe Road, Yanyu Village, Dalingshan Town, Dongguan City，Guangdong, China
Contact Person
HIE