Hwf6630-10 Tank-Type Chemical Vapor Deposition Furnace
| Attribute | Value |
|---|---|
| Atmosphere | Nitrogen/Hydrogen/Acetylene |
| Heating Zone Dimensions | Φ660×300mm(D*H) |
| Thermocouple Type | B |
| Heating Rate | ≤6ºC/Min |
| Temperature Control Stability | ±1ºC |
| Operating Temperature | 750°C |
| Maximum Temperature | 1000°C |
The HWF6630-10 tank vapor deposition furnace is designed for medium-temperature heat treatment of electronic products. It performs vapor phase reaction processes in nitrogen, acetylene, and hydrogen atmospheres, and can also be used for sintering processes under protective atmospheres. Equipped with a real-time computer monitoring system, this furnace is ideal for material process testing in research environments.
- Model: HWF6630-10
- Effective Chamber Size: Φ600×300mm (D×H)
- Heating Element: Internal heating with stainless steel heating tubes
- Processing Atmosphere: Nitrogen, Hydrogen, Acetylene
- Heating Method: FEC ceramic fiber heater
- Temperature Control Points: 2
- Temperature Stability: ±1°C, with PID parameter self-tuning function
- Control Method: Touch screen + PLC centralized control
- Alarm Protection: Audible and visual alarms for overtemperature and thermocouple breakage
- Heating Power: 16kW
- Power Requirements: 3-phase 5-wire, 220/380V, 50Hz
- External Dimensions: 1185×1745×1780mm (W×H×D)
| Item | Note | Quantity |
|---|---|---|
| Basic Components | Furnace | 1 UNIT |
| Inspection Certificate | Certificate of major outsourced components | 1 SET |
| Control Cabinet | 1 UNIT | |
| Technical Documents | Instructions, technical documents | 1 SET |
| Temperature Control Module | Yamatake or similar imported brands | 1 SET |
| Touchscreen | 10 inches | 1 SET |
| Mass Flow Meter | Nitrogen 200L/min, others 50L/min | 3 PCS |
- Environmental Conditions: Temperature 0~40°C, humidity ≤80% RH, no corrosive gases
- Floor Requirements: Level, no significant vibration, load-bearing capacity >500 kg/m²
- Power Requirements: Capacity >22 kVA, 3-phase 5-wire, 220/380 V, 50 Hz
- Installation Space: 1500 mm × 1500 mm × 3000 mm (D × W × H)
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