CVD Furnace Deposition Equipment for Semiconductor Material Preparation Thin Film
Price:
USD12,000-100,000/SET
MOQ:
1 set
Delivery Time:
60 days
Brand:
Jingtan
Product Description
Specification:
Vacuum deposition furnace:
Mainly used for the preparation of carbon-carbon composite materials, and the deposition furnace is mainly used for the preparation of pyrolytic carbon coating on the surface of graphite, semiconductor devices and heat-resistant scour materials.
|
Parameter /Model No.
|
JT-0305-C
|
JT-0505-C
|
JT-0608-C
|
JT-0608-C
|
JT-0812-C
|
JT-1120-C
|
JT-1218-C
|
JT-1520-C
|
|
Working Zone Size
φ×H(mm) |
300×500
|
500×500
|
600×800
|
600×1200
|
800×1200
|
1100×2000
|
1200×1800
|
1500×2000
|
|
Highest Temperature
(℃) |
2300
|
2300
|
2300
|
2300
|
2300
|
2300
|
2300
|
2300
|
|
Temperature uniformity(℃)
|
±5
|
±5
|
±5/±7.5
|
±7.5/±10
|
±7.5/±10
|
±10/±15
|
±10/±15
|
±15/±20
|
|
Limit Vacuum Degree(Pa)
|
1-100
|
1-100
|
1-100
|
1-100
|
1-100
|
1-100
|
1-100
|
1-100
|
|
Limit Vacuum Degree(Pa)
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
|
Heating method
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
|
Design temperature
|
1250℃/1650℃/1800℃/2200℃
|
|
Common temperature
|
900~1200℃
|
|
Vacuum degree
|
< 50Pa
|
|
Pressure rise rate
|
6.67pA /h(or 150Pa/24h) in cold state of empty furnace
|
|
Heating mode
|
graphite resistance heating or induction heating, independent temperature control, good temperature uniformity
|
|
Atmosphere medium
|
vacuum /CH4/C3H6/H2/N2/Ar
|
|
Gas control mode
|
mass flow meter control, multi-channel gas path, uniform flow field, no deposition dead Angle, good deposition effect;Multi-stage and efficient exhaust treatment system, environmentally friendly, easy to clean up
|
|
Furnace type
|
square, round, vertical or horizontal structure (non-standard design), fully enclosed deposition chamber, good sealing effect,
strong anti-pollution ability; |
|
Furnace cooling mode
|
furnace shell water cooling, external circulation quick cooling system can be selected, short cooling time, high production
efficiency; |
|
Structure form
|
horizontal - side discharge, vertical - up/down discharge
|
|
Locking mode
|
manual/automatic
|
|
Shell material
|
inner stainless steel/all stainless steel
|
|
Insulation material
|
carbon felt/graphite felt/carbon fiber cured felt
|
|
Infrared instrument
|
single colorimetric/double colorimetric
|
|
Power supply
|
KGPS/IGBT(only suitable for medium frequency heating)
Product parameter: |
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Company
Hunan Jingtan Automation Equipment Co., LTD.
Location
Building B4,Xinma Industrial Park, 959 Tianyi Avenue, Tianyuan District,Zhuzhou City,Hunan Province,China
Contact Person
Zola Liu