CVD CVI Treatment Vapor Deposition Furnace Graphite Resistance Heating With Cooling System
Price:
USD18,000-100,000/SET
MOQ:
1 set
Delivery Time:
60 days
Brand:
Jingtan
Product Description
Graphite Resistance Various Working Zone Size Vapor Deposition Furnace With Cooling System
Products Description
Vapor Deposition Furnace
(1) The electric heating way:uniform heating, simple operation, easy control and maintenance.
(2) The furnace is made of special materials with strong high temperature resistance, which can withstand the weight of high temperature heating elements and heavy components, and has excellent sealing performance, which can effectively prevent the sediment growing on the substrate from being contaminated.
(3) Intelligent pressure control, small pressure fluctuation;
(4) The fully enclosed structure has good thermal stability, good sealing effect and strong anti-pollution ability;
(5) Multi-channel process gas path, uniform flow, no deposition dead Angle, good deposition effect;
(6) Multi-stage high-efficiency exhaust treatment system, environmentally friendly, efficient collection of tar and by-products, easy to clean;
(7)The cooling method is adopted, the shell is cooled by water, the external circulation fast cooling system can be selected, the cooling time is short, and the production efficiency is high.
(2) The furnace is made of special materials with strong high temperature resistance, which can withstand the weight of high temperature heating elements and heavy components, and has excellent sealing performance, which can effectively prevent the sediment growing on the substrate from being contaminated.
(3) Intelligent pressure control, small pressure fluctuation;
(4) The fully enclosed structure has good thermal stability, good sealing effect and strong anti-pollution ability;
(5) Multi-channel process gas path, uniform flow, no deposition dead Angle, good deposition effect;
(6) Multi-stage high-efficiency exhaust treatment system, environmentally friendly, efficient collection of tar and by-products, easy to clean;
(7)The cooling method is adopted, the shell is cooled by water, the external circulation fast cooling system can be selected, the cooling time is short, and the production efficiency is high.
Product Usage
Used for CVD/CVI treatment of the surface or matrix of the material with hydrocarbon gas (such as C3H8, CH4, etc.) as the carbon source, and for the surface coating of the material, matrix modification, composite material preparation, etc.
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Model
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JT-CJL-04
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JT-CJL-14
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JT-CJL-31
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JT-CJL-74
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JT-CJL-127
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JT-CJL-211
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JT-CJL-326
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JT-CJL-588
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Working Zone Size
φ×H(mm)
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100×500
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150×800
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200×1000
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250×1500
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300×1800
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350×2200
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400×2600
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500×3000
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Limit Temperature(℃)
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2200/2800
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Temperature uniformity(℃)
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±3/±5
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±3/±5
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±5/±7.5
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±7.5/±10
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±7.5/±10
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±10/±15
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±10/±15
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±15/±20
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Limit Vacuum Degree(Pa)
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≤30
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≤30
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≤50
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≤50
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≤100
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≤100
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≤100
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≤100
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Pressure rise rate(Pa/h)
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1
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1
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2
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2
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5
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5
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5
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5
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Heating method
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graphite resistance/induction heating
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The above parameters can be adjusted according to the process requirements, and shall not be used as the basis for acceptance.The specific technical plan and agreement shall prevail.
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Hunan Jingtan Automation Equipment Co., LTD.
Location
Building B4,Xinma Industrial Park, 959 Tianyi Avenue, Tianyuan District,Zhuzhou City,Hunan Province,China
Contact Person
Zola Liu