JTM-10720AD 40kHz Ultrasonic Semiconductor Wafer Cleaning Machine for 300mm/200mm Wafers with 10-Tank System
Price:
One million
MOQ:
1
Delivery Time:
30-60work days
Brand:
Jietai
Product Description
Fully Automatic Ultrasonic Cleaning Machine for Semiconductor Silicon Wafers
The JTM-10720AD is a fully automatic ultrasonic cleaning system engineered for 300mm and 200mm semiconductor silicon wafers. This precision cleaning machine meets ultra-high cleanliness requirements for advanced semiconductor manufacturing processes including lithography, etching, and thin-film deposition.
Technical Specifications
| Parameter | Specification |
|---|---|
| Ultrasonic Frequency | 40kHz |
| Wafer Compatibility | 300mm and 200mm |
| Cleaning Tank Configuration | 10-tank integrated workflow |
| Particle Removal Capability | Down to 0.2μm |
| Drying System | DryN₂™ rapid drying with ≤5% RH |
| Control Interface | 15-inch touchscreen with PLC + HMI |
Key Features
Multi-Stage Ultrasonic Cleaning Process
- 40kHz high-frequency cavitation removes particles as small as 0.2μm
- 10-tank integrated workflow for comprehensive cleaning
- Chemical cleaning at 60-100°C for organic and ionic contaminants
- Multi-stage DI water rinses with 0.1μm ultra-filtration
- Rapid drying system with heated nitrogen for spot-free surfaces
Automated Intelligent Control
- PLC + HMI interface with 15-inch touchscreen
- Programmable 100+ custom recipes
- Real-time monitoring of temperature, ultrasonic power, and rinse flow rate
- Precision robotic arm with Teflon-coated grippers
- Gentle wafer transfer at ≤1.5m/s speed
High-Purity Material Construction
- Electropolished 316L stainless steel tanks (Ra
- PTFE nozzles and components
- Closed-loop filtration with 0.1μm membrane filters
- UV oxidation reduces chemical consumption by 60%
- Maintains cleaning fluid purity (TOC
Product Images
This SEMI-compliant cleaning system delivers consistent, repeatable results for critical pre- and post-fabrication cleaning processes in semiconductor manufacturing.
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
guangdong Jietai Ultrasonic cleaning Equipment Co., Ltd.
Location
2nd Floor, Unit 2, Building 16, No. 7, Science and Technology Avenue, Houjie Town, Dongguan City, Guangdong Province
Contact Person
Leonard