100KW Automated Ultrasonic Cleaning System 11 Tanks for Semiconductor Wafers

Jietai Ultrasonic/Fully Automatic Ultrasonic Cleaning Machine For Semiconductor Wafers 

1. Five-stage cleaning process to overcome the challenges of cleaning complex curved surfaces
   A customized five-stage cleaning process of ultrasonic rough cleaning → high-pressure spraying → fine brushing with brushes → ultrasonic rinsing → hot air drying is designed to address the three major pollution sources of camera frames (aluminum alloy/stainless steel/ceramic materials), namely CNC machining residues, electroplating oil stains, and fingerprint and sweat stains:

• Dual-frequency ultrasonic collaboration: The 28kHz low-frequency ultrasonic (15kW) breaks up hard particles remaining from CNC cutting fluid, while the 40kHz high-frequency ultrasonic (10kW) removes 0.1μm-level oil stains on the electroplated layer surface. The measured cleanliness rate of the inner wall of blind holes reaches 99.2%.
• Bionic brush system: Nylon bristle brushes with a diameter of 0.05mm (Shore hardness 50°) are used, combined with a ±1mm profile-following floating mechanism. This ensures a perfect fit to the R corners (minimum R0.3mm) of the frame and the coated surface, achieving zero scratches during the cleaning process (surface roughness Ra≤0.2μm).

2. Full-automatic intelligent control, increasing the yield rate by 30%

• Visual recognition feeding: Equipped with the Keyence visual system, it automatically locates the clamping points of the frame (with an accuracy of ±0.05mm). It is compatible with various sizes ranging from 50×30mm to 100×80mm, and the model change time is less than 3 minutes.
• Dynamic parameter compensation: The conductivity of the cleaning liquid is monitored in real-time through pressure sensors, automatically adjusting the ultrasonic power (stepless adjustment from 10% - 100%) and spraying pressure (5 - 15bar). This prevents damage to the anodized layer caused by excessive cleaning.
  3.Industrial-grade Durable Design for 24-Hour Continuous Operation
   
  • Core Components: Japanese NTK transducers (20,000-hour lifespan) + German PLC control system, with electromagnetic interference resistance meeting Industry 4.0 standards.
  • Tank Protection: 316L stainless steel tank (5mm wall thickness) lined with PTFE coating, resistant to corrosive solvents such as hydrofluoric acid (HF≤5%) and aqua regia, suitable for pickling processes of ceramic frames.