Semiconductor Silicon Wafer Cleaner with 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning and 60℃ Process Temperature
Price:
￥800000
MOQ:
1
Delivery Time:
30-60work days
Brand:
Jietai
Product Description
Semiconductor Silicon Wafer Cleaning System
This integrated cleaning system delivers sub-ppb level surface purity for high-precision semiconductor manufacturing, specifically designed for advanced node (≤7nm) microelectronics production.
Multi-Stage Cleaning Process
Ultrasonic Alkaline Cleaning (40KHz-80KHz): Removes organic contaminants including photoresist, hydrocarbons, and particulate matter ≥1μm from wafer surfaces and patterned structures
Ultrasonic Acid Cleaning (40KHz-80KHz): Targets inorganic impurities such as metal ion contaminants (Fe, Cu, Zn) and native oxide layers (SiO₂)
Pure Water Rinse Cycle: Final rinse with ultra-pure water (TOC ≤3ppb) eliminates residual chemistries, achieving surface resistivity ≥18.2MΩ*cm
Technical Specifications
| Ultrasonic Frequency | 40KHz-80KHz (multi-frequency selectable via PLC) |
|---|---|
| Process Temperature | 60℃ (PID-controlled, ±0.5℃ tolerance) |
| Wafer Compatibility | 4"-12" wafers including edge bevels and backside surfaces |
| Material Construction | PFA and high-purity alumina wetted components for HF/H₂SO₄ corrosion resistance |
Performance Metrics
| Particle Removal Efficiency | ≥99.9% for ≥0.1μm contaminants |
|---|---|
| Chemical Residue Elimination | ≤0.1ng/cm² (ICP-MS verified) |
| Automation Compatibility | FOUP/SMIF automated cassette handling for 24/7 fab integration |
Applications
Pre-lithography cleaning processes
Post-CMP (Chemical Mechanical Polishing) cleaning
Pre-implant cleaning in logic, memory, and sensor wafer production lines
Product Images
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
guangdong Jietai Ultrasonic cleaning Equipment Co., Ltd.
Location
2nd Floor, Unit 2, Building 16, No. 7, Science and Technology Avenue, Houjie Town, Dongguan City, Guangdong Province
Contact Person
Leonard