Ultrasonic Vacuum Hydrocarbon Cleaning System for Semiconductor & LCD Substrates
Price:
$20,000 to $50,000
MOQ:
1 set
Delivery Time:
55 days
Brand:
Hongshun
Product Description
Ultrasonic Vacuum Hydrocarbon Cleaning System for Semiconductor & LCD Substrates
Our Ultrasonic Vacuum Hydrocarbon Cleaning System is engineered for the ultra-high-purity demands of semiconductor and LCD substrates, delivering residue-free, damage-free cleaning critical for electronic component performance.
Advanced Cleaning Technology
The system combines two powerful technologies: high-frequency ultrasonics (40-120kHz) that generate micro-bubbles to dislodge submicron contaminants (dust, flux, organic residues) from substrate surfaces and fine circuits, paired with a vacuum hydrocarbon environment that enhances solvent penetration—reaching even narrow gaps without damaging delicate structures. The vacuum also accelerates drying via solvent boiling point reduction, ensuring no watermarks or solvent residues (meeting ISO 14644-1 Class 5 cleanroom standards).
Industrial Applications
Built with anti-static components and a sealed, contamination-free chamber, it safeguards sensitive substrates during cleaning. Ideal for semiconductor wafer, LCD panel, and microchip manufacturers, this system ensures consistent, high-purity results—critical for maintaining electronic component reliability and yield rates in advanced manufacturing.
Maintenance & After-Sales Support
We provide comprehensive maintenance and after-sales support for the HS-6684MFG, ensuring long-term reliable operation. The machine comes with a 1-year warranty (starting from final acceptance), covering free repairs and part replacements for faults caused by normal use.
Maintenance Schedule
- Circulation filters (10μ/5μ/20μ/50μ) require monthly replacement (≈15 pieces/month)
- Heat transfer oil in steam generation and distillation units should be changed every 2500 working hours
- Vacuum pump lubricating oil requires checking and topping up every 200 hours
- Accessible design with 1-meter maintenance clearance for easy component access
Support Services
- 4-hour response time for fault notifications
- General faults resolved within 24 hours, complex issues within 48 hours
- Free on-site training (≥24 hours) for 2+ operators
- Comprehensive operation manuals in Chinese (English available upon request)
- Paid maintenance contracts available for extended support
Consumption Reference
| Order Number | Name | Wastage | Remarks |
|---|---|---|---|
| 1 | Hydrocarbons | Add as required | Depends on cleaning volume |
| 2 | Filter cotton core | About 12 per month | Replace as required |
| 3 | Heat medium oil | 100L/2500 hours | Replace every 2500 hours of work |
| 4 | Vacuum pump lubricating oil | 0.2L/200 hours | Check and add every 200 hours of work |
| 5 | Power consumption | About 30kw/hour | Average value |
| 6 | Compressed air | 400 NL/min | Drive use (cylinder, pneumatic valve) |
For a complete technical solution of Vacuum Hydrocarbon Cleaner Machine, please contact us. We will customize the design based on your product technical requirements and factory layout.
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Dongguan Hongshun Automation Equipment Co., Ltd.
Location
Building 1, No. 13, Sanheng Road, Lianhu South, Tangxia Town, Dongguan City
Contact Person
Jesse Tang