3KW Ultrapure PFA Housing Chemical In Line Heater For Semiconductor Industry
3KW Semiconductor Industry Ultrapure PFA Housing Inline Chemical Heater
Benefits
- Heavy gauge pre-formed Inconel element can stand up to high stress conditions without breaking down
- Power modulator monitors heater element temp and prevents heat buildup inside the housing
- Sealed housing prevents chemistry from attacking internal components & provides secondary containment
- Internal leak detect strip (requires external monitor) gives early detection of chemical leaks
- All wiring shielded with teflon conduit to prevent chemical attack
- Indirect heating design, no submerged heater elements
- No N2 or gas purge required
Features
- No O-Ring seals
- All wetted surfaces are high purity PFA
- PTFE housing for double containment
- Maximized watt density for performance
- Light weight construction
- Small foot print enabled by unique design
- Zero maintenance required
- PFA fluid path, wide chemistry compatibility
- High temperature capability 200°C+
Specifications
|
Heater
|
PFA In-line Chemical Heater
|
|---|---|
|
Wattages
|
1.5-12 kW
|
|
Process Chemistries
|
Dilute Hydrofluoric acids (DHF),
Buffered Hydrofluoric acids (BHF), Buffered Oxide etch (BOE), Alkaline Chemicals (TMAH, KOH, NAOH), Fluorinated Solvents, Hydrofluoric Acid, Glycol, and much more. |
|
Max Operating Temperature
|
180°C (consult factory
for higher temperatures) |
|
Max Pressure
|
40 psi at 180°C
|
|
Voltages
|
200-400VAC,
single or 3 phase model dependent |
Industries
- Semiconductor Fabrication
- Solar Cell Manufacturing
- Flat-Panel Display, LEDs & Electronics
- Chemicals Manufacturing
- Industrial Manufacturing
Applications
Fluid Heating
Filtration
Sterilization & Cleaning
Fluid Heating
Ultra-Pure Fluid Heaters
Overview
We offers a variety of patented and uniquely-engineered ultra-pure precision heaters for heating various chemical and plating solutions, gases, solvents and deionized water. Our award-winning engineers design and manufacture components from PFA, applied to patented PFA heating technology, that achieves a small mass with a large surface area, providing a faster heater response and a longer life at elevated temperatures. Our extremely flexible high-output heating coils are capable of being fashioned into an almost endless variety of shapes and sizes.
The resulting heaters outlast competing products of lesser capability and are designed into a wide range of standard and customized products.
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.