Ultra High Purity Heating PFA Industrial Inline Heater For Corrosive Chemical Heating
3KW Semiconductor Industry Ultrapure PFA Housing Inline Chemical Heater
Benefits
- Heavy gauge pre-formed Inconel element can stand up to high stress conditions without breaking down
- Power modulator monitors heater element temp and prevents heat buildup inside the housing
- Sealed housing prevents chemistry from attacking internal components & provides secondary containment
- Internal leak detect strip (requires external monitor) gives early detection of chemical leaks
- All wiring shielded with teflon conduit to prevent chemical attack
- Indirect heating design, no submerged heater elements
- No N2 or gas purge required
Features
- No O-Ring seals
- All wetted surfaces are high purity PFA
- PTFE housing for double containment
- Maximized watt density for performance
- Light weight construction
- Small foot print enabled by unique design
- Zero maintenance required
- PFA fluid path, wide chemistry compatibility
- High temperature capability 200°C+
Specifications
|
Heater
|
PFA In-line Chemical Heater
|
|---|---|
|
Wattages
|
1.5-12 kW
|
|
Process Chemistries
|
Dilute Hydrofluoric acids (DHF),
Buffered Hydrofluoric acids (BHF), Buffered Oxide etch (BOE), Alkaline Chemicals (TMAH, KOH, NAOH), Fluorinated Solvents, Hydrofluoric Acid, Glycol, and much more. |
|
Max Operating Temperature
|
180°C (consult factory
for higher temperatures) |
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Max Pressure
|
40 psi at 180°C
|
|
Voltages
|
200-400VAC,
single or 3 phase model dependent |
Industries
- Semiconductor Fabrication
- Solar Cell Manufacturing
- Flat-Panel Display, LEDs & Electronics
- Chemicals Manufacturing
- Industrial Manufacturing
Applications
Acid Heating And Corrosive Chemical Heating
Built to withstand the stress of acids or other corrosive chemicals while maintaining the highest quality and safety standards, Process Technology fluoropolymer (PTFE) heaters and exchangers are engineered to perform.
| Acid Heating And Corrosive Chemical Heating(2) | ||
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TF SERIES
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HXO SERIES
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HXF SERIES
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HX SERIES Low watt density, spiral. Fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions . Single phase. 500-9000 watts, 120-600 volts.  |
X SERIES COIL
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