Ultrapure 10-18kW PTFE Wetted Surfaces Inline Chemical Fluid Heater For Semiconductor

Overview

PFA/PTFE in-line heater are desinged for hydrofluoric acid (HF), potassium hydroxide (KOH), and other chemistry compatible with PFA.

These PFA heaters push widely accepted high-purity materials to operating extremes while maximizing performance and reliability.

We has once again taken heating of high-purity liquids to a new level of performance and reliability.

We has once again taken heating of high purity liquids to a new level of performance and reliability. Heating liquids using high purity materials in a harsh environment requires special skills and knowledge that can only be gained from experience. For over 40 years, Our Engineers have been refining and improving the heated quartz bath and understand the critical needs of the Semiconductor and related industries. The sum of that knowledge has been incorporated into the PFA in-line heater to create products that not only perform, but simplify installation and maintenance as well. Exemplified by our long-standing ISO 9001 registration, our dedication to manufacturing process control assures that our customers receive uniformly high-quality products in a timely manner. We offers a wide range of standard and custom models to allow for easy integration into almost any application.

Features

• No O-Ring seals
• All wetted surfaces are high purity PFA
• PTFE housing for double containment
• Maximized watt density for performance
• Light weight construction
• Small foot print enabled by unique design
• Zero maintenance required
• PFA fluid path, wide chemistry compatibility
• High temperature capability 200°C+

 

Specifications

Heater	PTFE In-line Chemical Heater
Wattages	1.5-12 kW
Process Chemistries	Dilute Hydrofluoric acids (DHF), Buffered Hydrofluoric acids (BHF), Buffered Oxide etch (BOE), Alkaline Chemicals (TMAH, KOH, NAOH), Fluorinated Solvents, Hydrofluoric Acid, Glycol, and much more.
Max Operating Temperature	180°C (consult factory for higher temperatures)
Max Pressure	40 psi at 180°C
Voltages	200-400VAC, single or 3 phase model dependent

 

 

Industries

• Semiconductor Fabrication
• Solar Cell Manufacturing
• Flat-Panel Display, LEDs & Electronics
• Chemicals Manufacturing
• Industrial Manufacturing

 

 

Applications

Flammable Solvent Heating
Products designed to safely heat IPA and low flash-point solvents, meeting the most stringent cleanliness requirements to support next-generation semiconductor node technologies.

 

Products For Flammable Solvent Heating
PFA Inline Chemical Heater	PTFE Inline Chemical Heater	Inline Chemical Heater