Industrial Water Heating Equipment for Semiconductor Inline Chemical Heater

Overview

PFA in-line heater are desinged for hydrofluoric acid (HF), potassium hydroxide (KOH), and other chemistry compatible with PFA.

These PFA heaters push widely accepted high-purity materials to operating extremes while maximizing performance and reliability.

We has once again taken heating of high-purity liquids to a new level of performance and reliability.

We has once again taken heating of high purity liquids to a new level of performance and reliability. Heating liquids using high purity materials in a harsh environment requires special skills and knowledge that can only be gained from experience. For over 40 years, Our Engineers have been refining and improving the heated quartz bath and understand the critical needs of the Semiconductor and related industries. The sum of that knowledge has been incorporated into the PFA in-line heater to create products that not only perform, but simplify installation and maintenance as well. Exemplified by our long-standing ISO 9001 registration, our dedication to manufacturing process control assures that our customers receive uniformly high-quality products in a timely manner. We offers a wide range of standard and custom models to allow for easy integration into almost any application.

• Heavy gauge pre-formed Inconel element can stand up to high stress conditions without breaking down
• Power modulator monitors heater element temp and prevents heat buildup inside the housing
• Sealed housing prevents chemistry from attacking internal components & provides secondary containment
• Internal leak detect strip (requires external monitor) gives early detection of chemical leaks
• All wiring shielded with teflon conduit to prevent chemical attack
• Indirect heating design, no submerged heater elements
• No N2 or gas purge required

Specifications

Heater	PFA In-line Chemical Heater
Wattages	1.5-12 kW
Process Chemistries	Dilute Hydrofluoric acids (DHF), Buffered Hydrofluoric acids (BHF), Buffered Oxide etch (BOE), Alkaline Chemicals (TMAH, KOH, NAOH), Fluorinated Solvents, Hydrofluoric Acid, Glycol, and much more.
Max Operating Temperature	180°C (consult factory for higher temperatures)
Max Pressure	40 psi at 180°C
Voltages	200-400VAC, single or 3 phase model dependent

 

 

Industries

 

• Semiconductor Fabrication
• Solar Cell Manufacturing
• Flat-Panel Display, LEDs & Electronics
• Chemicals Manufacturing
• Industrial Manufacturing

 

 

Applications

Surface Preparation
Most surfaces must be prepared or prepped before plating. The Surface Preparation step often includes cleaning, sanitization, or electropolishing.

Products For Surface Preparation
MOTS SINGLE – BOTTOM, DERATED Derated, low watt density, L-shaped, bottom, metal over the side Immersion Heater. Single or Three phase. Three phase. 500-6000 watts, 120-480 volts. .	MOTS TRIPLE – L SHAPED L-shaped, bottom style metal over the side heater. Three phase. Single or three phase. 3000-36000 watts, 200-600 volts.	6HS SERIES – TUBULAR Over the side, 6 element, tubular heater. Three phase. 6000-21000 watts, 208-600 volts.
9HX SERIES Low watt density, 9 element fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. Three phase. 3000-18000 watts, 208-600 volts.	6HX SERIES Low watt density, 6 element fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. Three phase. 2000-12000 watts, 208-600 volts.	3HXOL SERIES Low watt density, 3 element, bottom heater. Fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions . 3000-18000 watts, 208-480 volts.
HXF SERIES Low-watt density, spiral heater. Fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. 500-6000 watts, 120-600 Volts.	HX SERIES Low watt density, spiral. Fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions . Single phase. 500-9000 watts, 120-600 volts.	QM SERIES HEATER ELEMENT Metal Element (QM part 1). Single phase. Heats up to 212°F (100°C). 500-10000 watts, 120-600 volts.