Inline PTFE Fluoropolymer Chemical Heater For Semiconductor Wet Processes
Inline PTFE Fluoropolymer Chemical Heater For Semiconductor Wet Processes
Overview
PFA in-line heater are desinged for hydrofluoric acid (HF), potassium hydroxide (KOH), and other chemistry compatible with PFA.
These PFA heaters push widely accepted high-purity materials to operating extremes while maximizing performance and reliability.
We has once again taken heating of high-purity liquids to a new level of performance and reliability.
Applications Include:
SC1: ammonium hydroxide (NH4OH), and hydrogen peroxide (H2O2)
SC2: hydrochlorice acid (HCl) and hydrogen peroxide Buffered oxide etch (BOE) process: hydrofluoric acid (HF) and ammonim fluoride (NH4F)
Nitride etch/strip: phosphoric acid (H3PO4)Various acids such as:
Hydrochloric (HCl)
Hydrofluoric (HF)
Acetic (C2H4O2)
Nitric (HNO3)
Sulfuric (H2SO4)
Sulfuric acid and hydrogen peroxide
Sulfuric acid and ozone (O3)
Hydrofluoric acid and glycol (C2H6O2)
Potassium hydroxide (KOH)
Sodium hydroxide (NaOH)
Electroless nickel Electroless copper Electroless gold Deionized water
Some solvents (consult factory)
Specifications
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Heater
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PFA In-line Chemical Heater
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|---|---|
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Wattages
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1.5-12 kW
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Process Chemistries
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Dilute Hydrofluoric acids (DHF),
Buffered Hydrofluoric acids (BHF), Buffered Oxide etch (BOE), Alkaline Chemicals (TMAH, KOH, NAOH), Fluorinated Solvents, Hydrofluoric Acid, Glycol, and much more. |
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Max Operating Temperature
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180°C (consult factory
for higher temperatures) |
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Max Pressure
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40 psi at 180°C
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Voltages
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200-400VAC,
single or 3 phase model dependent |
Industries
- Semiconductor Fabrication
- Solar Cell Manufacturing
- Flat-Panel Display, LEDs & Electronics
- Chemicals Manufacturing
- Industrial Manufacturing
Others Applications
Precious Metal Deposition
Engineered to meet the most stringent requirements, accurate and reliable Heaters in Precious Metals' Deposition reduce materials waste. Low ripple Power Supplies provide clean and smooth direct current (DC), precision results while also saving on materials.
Products For General Metal Finishing |
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MOTS SINGLE
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MOTS SINGLE – DAS, PHOSPHATE
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MOTS TRIPLE – L SHAPED, DERATED
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MOTS SINGLE – BOTTOM, DERATED .
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MOTS TRIPLE – L SHAPED
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6HS SERIES – TUBULAR
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| 9HX SERIES Low watt density, 9 element fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. Three phase. 3000-18000 watts, 208-600 volts.  |
6HX SERIES Low watt density, 6 element fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. Three phase. 2000-12000 watts, 208-600 volts.  |
3HXOL SERIES Low watt density, 3 element, bottom heater. Fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions . 3000-18000 watts, 208-480 volts.
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Get in Touch
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