0.4 MPA Pressure Deionized Water Heater System Inline Fluid Heater For Semiconductor
Price:
Contact Us
MOQ:
1 PCS
Delivery Time:
10-15 working days
Brand:
Surplus
Product Description
Inline Fluid Heater 0.4 MPA Pressure Deionized Water Heater System
Inline Fluid Heater 0.4 MPA Pressure DI Water Heaters
DI Fluid Water Heaters for Semiconductor Manufacturing Process
| Model | PWH-24i | PWH-48i | PWH-72i | PWH-96i | PWH-144i |
|---|---|---|---|---|---|
| Heating method | Radiation heating with near infrared rays | ||||
| Heater wattage | 24kW | 48kW | 72kW | 96kW | 144kW |
| Standard flow rate (at 55°C) | 6l/min | 12l/min | 18l/min | 24l/min | 36l/min |
| Minimum heating flow rate | 2l/min | 5l/min | 10l/min | ||
| Temperature setting range | 25 to 85°C | ||||
| Temperature control accuracy | ±1°C ※1 | ||||
| Flow meter indication range | 0 to 10l/min | 0 to 50l/min (Not the guaranteed range of temperature control accuracy) | |||
| Allowable DI-Water pressure | 0.4MPa (Relief pressure: 0.35MPa) | ||||
| Heater | Halogen lamp. Indirect heating without direct contact with water | ||||
| Heating vessels material | High-purity transparent quartz | ||||
| Wetted materials of the piping | Fluorocarbon polymer | ||||
| Safety functions | Flow rate error, overheating, no liquid operation, leakage sensor disconnection and lamp disconnection Power off, alarm, error indication or signal output in case of error detection | ||||
| External communication function | RS-232C/RS-485 (option) ※2 | ||||
| External input/output function | 8-input/14-output signal (Varies depending on specification) | ||||
| Overall dimensions (mm) ※3 | W340×D850×H1384 | W340×D850×H1384 | W340×D850×H1584 | W340×D850×H1986 | W1050×D700×H2004 |
| Weight | Approx. 140kg | Approx. 150kg | Approx. 160kg | Approx. 210kg | Approx. 410kg |
| Power requirement (50/60Hz) | AC200/208V 69/67A | AC200/208V 139/133A | AC200/208V 208/200A | AC200/208V 277/266A | AC200/208V 416/400A |
A hot water supply system for ultra-pure water that is ideally suited for point-of-use for rinsing of silicon wafers and glass substrates of liquid crystal displays.
DI-Water Heater heats purified water used to rinse silicon wafers in the manufacture of semiconductor and glass substrates in the manufacture of LCDs. The halogen lamps are housed in transparent, double-walled high-purity quartz glass tubes to ensure efficient and contaminant free heating of ultra-pure water. The slim, compact design minimizes foot point for installation at the point of use.
Features
- Clean - Heating vessels through which water-flows and all plumbing pipes are respectively made of high-purity quartz glass and fluorocarbon polymer.
- Compact - Slim and compact unit requires minimal foot print for installation at the point of use.
- Excellent temperature control - High power of halogen lamps quickly raise the temperature and adjust it in response to variations in the water flow rate.
- High Efficiency - Efficiency with than 95%.
- Safety - Optimum operational safety is provided through displays and sound alarms against abnormal conditions such as overheating, uncharged heating, excessive pressure and leakage of water.
Applications
- Heating of ultra-pure water for rinsing of silicon wafers and glass substrates of LCDs.
- Heating of pure water used in place of CFC for cleaning.
※1 Not the guaranteed range of temperature control accuracy
※2 Option
※3 Dimensions may vary depending on specification
※2 Option
※3 Dimensions may vary depending on specification
Similar Products
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Yingxi Trading Company
Location
Room 303, Unit 2, Building 22, Pingchou District 1, Jiangdong Street, Yiwu City, Jinhua City,Zhejiang Province,China
Contact Person
Doris Lu