Wafer-Level Atomic Force Microscoperoscope
Price:
Price Negotiable | Contact us for a detailed quote
MOQ:
1
Delivery Time:
Negotiable
Brand:
Truth Instruments
Product Description
Wafer-Level Atomic Force Microscope
Product Model:
Atommax
Product Overview:
Using micro-cantilever probe structures, this instrument enables 3D morphology characterization of conductive, semiconductive, and insulating solid materials, achieving wafer-level large-sample morphology characterization. Combined with an optical image, the electrically driven sample positioning stage allows for 1 μm positioning accuracy within a 200 x 200 mm area. with fully automated operations for laser alignment, probe approach, and scanning parameter adjust.ments.
Equipment Performance Specifications
| Parameter | Specification |
|---|---|
| Sample Size | Compatible with 8-inch wafers and below |
| Scanning Range | Maximum 100μm * 100μm * 910μm |
| Scanning Angle | 0~360" |
| Resolution | Z-axis closed-loop resolution 0.15 nm; X/Y closed-loop resolution 0.5 nm |
| Scanning Probe XY Direction lmage Resolution | Not less than 32x32~4000x4000 |
| Operating Modes | Contact mode, tapping mode, phase imaging mode, lift mode, multi-directional scanning mode |
| Multi-Function Measurement | EFM,KFM,PFM,MFM |
Application Cases
- Potential of the Au-Ti strip electrode sheet
- Scanning mode: KPFM (lift-mode)
- Scanning range: 18μm * 18μmTitanium Film - Aluminum Titanate Film
- Electrostatic force of the Au-Ti strip electrode sheet
- Scanning mode: EFM (lift mode)
- Scanning range: 18μm * 18μm
- Magnetic domains in Fe-Ni thin films
- Scanning mode: MFM (lift-mode)
- Scanning range: 14μm * 14μm
- PbTiO3-piezoelectric corresponding vertical amplitude image
- Scanning mode: PFM (contact-mode)
- Scanning range: 20μm * 20μm
- Co/Pt Thin Film
- Scanning Mode: Magnetic Force Microscopy (MFM)
- Scanning Range: 25 μm * 25 μm
Similar Products
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Truth Instruments Co., Ltd.
Location
169 Zhuzhou Road, Laoshan District, Qingdao, Shandong Province, China
Contact Person
Alex TANG