Wafer Level Manual Probe Station In Plane Magnetic Field Probe Station
Wafer-Level Manual In-Plane Magnetic Field Probe Station
The wafer-level manual in-plane magnetic field probe station PS1D-Manu8 is a high-precision device designed for wafer testing, suitable for electrical and magnetic measurements in laboratories and enterprises. It provides a highly uniform in-plane magnetic field to ensure stable testing environments and is compatible with multiple sample sizes to meet diverse testing needs. With manually adjustable X/Y-axis displacement and 360° rotation, users can precisely control sample positioning. Equipped with 4 groups of DC or microwave probes, it easily achieves magnetoresistance and other testing functions. PS1D-Manu8 will assist in efficient and precise electrical/magnetic measurement and analysis.
| Equipment Performance Indicator | Description |
|---|---|
| Sample Size | Compatible with 8-inch and below |
| Magnetic Field Strength | 50 mT |
| Magnetic Field Uniformity | Better than ±1%φ1 mm |
| Magnetic Field Resolution | PID closed-loop feedback regulation, resolution 0.05 mT |
| Sample Displacement Stage | XY manual stroke ±100 mm, adjustment resolution 1 μm; Z-axis stroke 10 mm, adjustment resolution 10 μm; T-axis 360° rotation, adjustment resolution 0.05° |
| Probe Seat | 4 groups of DC probes |
| Optical Magnification | 0.75 X-5 X |
| Source Meter | N5173B, Keithley 6221, Keithley 2182A |
| Testing Functions | RH testing |
- Magnetoresistance Testing
- Magnetoresistance Testing
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