KEYENCE FD-Q10C | Digital Inline Liquid Flow Sensor 0.5–10 L/min, PFA Body, NPN Open Collector, M8 Pigtail
KEYENCE FD-Q10C digital inline liquid flow sensor — 0.5–10 L/min range, PFA wetted parts, NPN open-collector pulse output, M8 3-pin connector. For DI water, chemicals, coolants in semiconductor & pharma.
Product Overview
The KEYENCE FD-Q10C is a digital inline liquid flow sensor from the FD-Q series (Chemically Resistant / Ultrapure Liquid Type), designed for non-contact measurement of low-viscosity liquids in small-diameter process lines. It features a PFA (perfluoroalkoxy) flow tube and wetted parts, making it suitable for deionized water, acids, alkalis, and photoresist solvents in semiconductor and pharmaceutical applications. The sensor outputs an NPN open-collector pulse proportional to flow rate (or alarm via setting switch on amplifier — FD-Q series typically pairs with dedicated FD amplifier such as FD-AMP1 or integrated display unit) and connects via an M8 3-pin male connector (pigtail cable). The Q10C variant covers 0.5–10 L/min with a one-touch fitting or threaded process connection (typically Rc 1/4" or SUS hose nipple — confirm per regional catalog). No moving parts — flow is sensed via thermal or ultrasonic principle depending on FD sub-family (FD-Q uses thermal micro-sensor array).
Technical Specifications (Flow & Electrical)
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Parameter
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Specification
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Model / Order Code
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FD-Q10C (KEYENCE FD Series — Chem. Resistant Inline Flow Sensor, Mid Range)
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Measured Medium
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Liquids — DI water, acids (dilute), alkalis, solvents (check chemical compatibility chart)
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Flow Rate Range
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0.5 … 10.0 L/min (calibrated for water at 20 °C)
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Min. Detectable Flow
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0.3 L/min (typical — varies with fluid density/viscosity)
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Repeatability
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± 2 % F.S. (typical for water)
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Output Type (Sensor Side)
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NPN Open Collector (Switching / Pulse) — paired with FD-AMP series amplifier for display & setpoint
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Supply Voltage (via Amplifier)
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12–24 V DC (supplied by connected FD-AMP unit)
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Response Time
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≤ 500 ms (typical — configurable on amplifier)
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Fluid Temp. Range
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+5 … +60 °C (no freezing)
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Fluid Pressure (Max.)
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0.7 MPa (7 bar / 100 psig) — verify per fitting type
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Technical Specifications (Mechanical & Construction)
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Parameter
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Specification
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Wetted Parts Material
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PFA (flow tube), PTFE (seals), PVDF (optional sensor cap) — metal-free flow path
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Process Connection
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Typically Rc 1/4" female or One-Touch Hose Barb φ6/φ8 mm — confirm exact suffix (C = fitting type per KEYENCE catalog: often compression or barb for 6×8 mm tubing)
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Sensor Body (Non-Wetted)
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PBT / Polycarbonate — IP40 (sensor head), IP65 when mated with proper connector
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Electrical Connection
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M8 × 1, 3-pin A-coded Male Plug (pigtail — 2 m standard cable, can be extended with M8 extension cord)
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Ambient Temperature
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0 … +50 °C (no condensation)
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Degree of Protection
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IP65 (connected), IP40 (disconnected)
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Dimensions (Sensor Only)
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≈ 60 × 30 × 30 mm (body) + fittings
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Weight (Approx.)
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80 g
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Required Accessory
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FD-AMP1 / FD-AMP2 Amplifier / Display Unit (sold separately — provides setpoint, alarm, analog output 4–20 mA / 0–5 V option)
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Certifications
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CE, KC
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Key Features
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All-PFA Wetted Path: No metal contamination — ideal for UPW (ultra-pure water), CMP slurry lines, and corrosive chemical dosing in semiconductor fabs.
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No Moving Parts: Thermal micro-sensor — no paddle/wheel to clog or wear; minimal pressure drop (< 0.02 MPa typical at max flow).
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Compact Inline Design: Fits tight process skid tubing runs — direct inline installation vs. larger turbine meters.
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Pairs with FD-AMP Amplifier: Dedicated amp provides local LCD display, HI/LO alarm relays, analog retransmission, and key-lock — simplifies loop integration.
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Quick-Disconnect M8 Connector: Easy removal for maintenance/calibration without disturbing wiring.
Typical Applications
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Semiconductor Wet Process: Chemical dispense line flow verification (HF, H₂SO₄ dilute, developer — per compatibility chart).
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Pharma / Biotech Skid: DI water or CIP solution flow confirmation in small-bore tubing.
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Coolant / Lubricant Monitoring: Low-flow confirmation on spindle or laser head cooling loops.
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Chemical Dosing Systems: Verify metering pump output on acid/alkali injection lines.
About ACH
Founded in 2012, ACH is a top-tier distributor of industrial automation products, supplying genuine devices from leading brands like ABB, P+F, E&H, AB, MTL to emerging markets worldwide. Our mission is to provide 100% Genuine products at the most competitive prices, helping customers reduce costs and strengthen their market position.
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Frequently Ask & Questions
Are preferential prices available?
Long-term brand partners can get competitive product prices. At the same time, ACH controls the profit per order to 5%, providing the most competitive prices.
Are the Products Genuine OEM Units?
Yes, all products from ACH are certified genuine OEM units. We acquire our inventory through official OEM channels and trusted third-party suppliers, ensuring every item is authentic and reliable.
How will you arrange shipment?
We'll handle the shipping for you. Through our partnerships, we can secure competitive rates with major carriers like FedEx, DHL, TNT, and UPS, ensuring a smooth and cost-effective delivery.
What is the warranty of goods?
One-year Warranty.
How long is the logistics cycle of the product?
Products are divided into spot and futures, and the delivery period of different brands of products is also different. For details, please contact the ACH business manager.
