Carbon Material Processing CVD Machine Chemical Vapor Deposition System 200KW
Carbon Material Processing 2500℃ Vacuum Induction CVD Furnace
Description:
- The vertical deposition furnace is specialized in high-temperature (≤2500°C) processing of special ceramic and carbon materials. It utilizes intermediate frequency induction heating, matched with IGBT power control type, which effectively cuts down on energy consumption.
- Equipped with imported high-precision infrared temperature measuring instruments and temperature controllers, it ensures reliable and accurate temperature control. The integrated exhaust collection system achieves "sintering + debinding" in a single step, boosting production efficiency and savingenergy at the same time.
- Boasting a compact and aesthetically pleasing design along with low energy consumption, it iscustomized to fulfill the precise process needs of advanced material production.
Application:
- Carbon-carbon (C/C) composites
- Carbon composite materials
- Graphite components
Specification:
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CVD Furnace -- Technology Parameter |
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Production usage |
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NTI-CJL-42L |
NTI-CJL-100L |
NTI-CJL-196L |
NTI-CJL-339L |
NTI-CJL-803L |
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Working size |
mm |
φ300×600 |
φ400×800 |
φ500×1000 |
φ600×1200 |
φ800×1600 |
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Heating type |
/ |
IF induction heating |
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Control type |
/ |
IGBT control |
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HT zone capacity |
L |
42 |
100 |
196 |
339 |
803 |
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Overall Dimension |
mm |
5000x6000 |
5500x6500 |
6000x7000 |
6500x7500 |
7000x8000 |
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Loading weight |
g |
HT zone capacity×density (g/cm³)×1000 Remark:1L=1000cm³ |
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IF power |
Kw |
100 |
150 |
200 |
250 |
30 |
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Ultimate vacuum |
Pa |
50 |
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Max.working temperature |
℃ |
2500 |
2500 |
2500 |
2500 |
2500 |
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Vapor deposition temperature |
℃ |
Wthin 2000 ℃ |
Wthin 2000 ℃ |
Wthin 2000 ℃ |
Wthin 2000 ℃ |
Wthin 2000 ℃ |
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Temperature uniformity |
℃ |
±5 |
±5 |
±10 |
±10 |
±10 |
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Working environment |
/ |
Vacuum or Ar, Nitrogen atmosphere protection(micro positive pressure) |
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Vapor deposition environment |
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300-3000pa air pressure, charging into CH3CH2CH3, CH4, C3H6 |
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Furnace Configuration:
- Control System: Optional 1-to-1 (one control cabinet for one furnace), equipped with Delta PLC for stable, intelligent operation.
Key standard & optional components:
- Vacuum System: Integrated high-performance vacuum unit (including vacuum pump, valve group) to maintain stable vacuum environment during sintering.
- Gas Purifier: High-efficiency gas purification equipment (optional) to filter impurities and ensure clean gas supply for atmosphere-controlled processes.
- Cooling Tower: Optional cooling equipment to achieve efficient heat dissipation, ensuring stable operation of high-temperature components.
- Temperature Measurement: Equipped with Raytek (US) infrared thermometer for real-time, accurate high-temperature monitoring (supports precise temperature control up to 2500℃).
- Air Compressor: Optional auxiliary equipment to provide stable air supply for pneumatic components.
Feature Advantages:
- Precise Temperature Control: Imported thermometers & controllers ensure high accuracy and stability.
- Energy-Efficient Design: Integrated exhaust collection system + low empty furnace power cuts energy costs.
- Customized Protection: Multi-alarm functions (water shortage, overcurrent) enhance operational safety.
- Flexible Gas Control: Separate flow regulation for 3 gases (argon/nitrogen/propylene) adapts to diverse processes.
- Compact & Practical: Vertical structure + aesthetic design saves space while meeting industrial production needs.
After-sales Service:
- Warranty: 1-year warranty for core electrical components against manufacturing defects.
- Lifetime Service: Lifetime technical support, including remote troubleshooting, maintenance guidance, and replacement part supply (charged for non-warranty parts).
- Response Efficiency: 24-hour online consultation for urgent issues; on-site service (available globally) can be arranged based on your needs (travel costs extra).
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.


