Production-Grade Vacuum Resistance Furnace Up to 2200℃ for Polysilicon Sintering
Price:
$ 60000-100000
MOQ:
1 Set
Delivery Time:
90 Days
Brand:
Nuotian
Product Description
Production-Grade Vacuum Resistance Furnace Up to 2200℃ for Polysilicon Sintering
Description:
- Tailored for semiconductor-grade polysilicon mass production, this 1-to-1 vacuum resistance furnace delivers 2200℃ stable heating through a sealed vacuum chamber and premium resistance heating. It operates on 380V 3-phase power with thyristor control, ensuring ultra-stable temperature output for high-purity material processing.
- Its rugged industrial structure resists wear from continuous operation, while the precision temperature regulation system eliminates thermal fluctuations—critical for maintaining polysilicon purity and consistency in large batches. The furnace’s sealed design prevents external contamination, meeting semiconductor industry standards.
- Outfitted with multi-layer safety protections (over-heat alarms, vacuum failure alerts, emergency stop) and an intuitive interface, it requires minimal oversight, making it ideal for large-scale polysilicon sintering for solar cells and semiconductor wafers.
Application:
- Polysilicon Sintering: Mass production of high-purity polysilicon for solar cell manufacturing.
- Semiconductor Material Processing: Continuous heat treatment of polysilicon for semiconductor wafer production.
- High-Purity Silicon Treatment: Bulk processing of silicon materials for electronic components.
Specification:
|
Resistance Furnace -- Technology Parameter |
||||||
|
|
Lab usage |
Production usage |
||||
|
NTI-DZL-54W |
NTI-DZL-98W |
NTI-DZL-300w |
NTI-DZL-400W |
NTI-DZL-720W |
||
|
Working size |
mm |
300×300×600 |
350×350×800 |
500×500×1200 |
500×500×1600 |
600×600×2000 |
|
Heating type |
/ |
Resistance heating |
||||
|
Control type |
/ |
SCR control |
||||
|
HT zone capacity |
L |
54 |
98 |
300 |
400 |
720 |
|
Loading weight |
g |
HT zone capacity ×density(g/cm³)×1000 Remark:1L=1000cm³ |
||||
|
IF power |
Kw |
100 |
150 |
300 |
400 |
650 |
|
Ultimate vacuum |
Pa |
20 |
||||
|
Max.working temperature |
℃ |
2300 |
2300 |
2300 |
2300 |
2300 |
|
Usual working temperature |
℃ |
2200 |
2200 |
2200 |
2200 |
2200 |
|
Temperature uniformity |
℃ |
±10 |
±10 |
±10 |
±10 |
±10 |
|
Working environment |
/ |
Vacuum or Ar, Nitrogen atmosphere protection(micro positive pressure) |
||||
Furnace Configuration:
- Control System: Optional 1-to-1 (one control cabinet for one furnace), equipped with Delta PLC for stable, intelligent operation.
Key standard & optional components:
- Vacuum System: Integrated high-performance vacuum unit (including vacuum pump, valve group) to maintain stable vacuum environment during sintering.
- Gas Purifier: High-efficiency gas purification equipment (optional) to filter impurities and ensure clean gas supply for atmosphere-controlled processes.
- Cooling Tower: Optional cooling equipment to achieve efficient heat dissipation, ensuring stable operation of high-temperature components.
- Temperature Measurement: Equipped with Raytek (US) infrared thermometer for real-time, accurate high-temperature monitoring (supports precise temperature control up to 2200℃).
- Air Compressor: Optional auxiliary equipment to provide stable air supply for pneumatic components.
Feature Advantages:
- High-Temperature Capability: Reaches up to 2200℃.
- Vacuum & Resistance Heating: Vacuum environment prevents material oxidation.
- Precise Control: Equipped with FP93 Japanese Shimaden High-Precise Temperature Control System, ensuring stable sintering processes and consistent product quality.
- Versatility: Compatible with a wide range of materials (carbon,ceramics, alloys, c/c,special powders), meeting diverse production needs.
- Safety & Reliability: Equipped with short circuit, over pressure, over-temperature, over current, water shortage, and other protection mechanisms for safe operation.
![]()
After-sales Service:
We provide comprehensive after-sales support to ensure your equipment operates smoothly:
- Warranty: 1-year warranty for core electrical components against manufacturing defects.
- Lifetime Service: Lifetime technical support, including remote troubleshooting, maintenance guidance, and replacement part supply (charged for non-warranty parts).
- Response Efficiency: 24-hour online consultation for urgent issues; on-site service (available globally) can be arranged based on your needs (travel costs extra).
Similar Products
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Zhuzhou Nuotian Electric Heating Technology Co.,Ltd.
Location
No.2 Changcheng Road, Xiangtang Community, Qunfeng TownTianyuan District, Zhuzhou City, Hunan Province, China
Contact Person
Annie Zhu