Premixed gases ExciStar 200 laser gas with highly experience for export
Premixed gases ExciStar 200 laser gas with highly experience for export
Product Name: Laser Mixture Gases
Other names: Argon fluoride laser gas (193nm)
Model:ExciStar 200
Responsible manager for excimer laser gas :Suyee Su
what app:008618602768623
Product types: ArF,F2/Ar/He/Ne
UN NO. : UN1956
Cylinder volume: 16L, 20L
Valve type: CGA679, DIN 8, DIN 14
Parts of product data which is as follows:
|
Specification |
Certified Concentration |
Units
|
Analytical Method |
|
|
Excimer Laser Gases |
Standards |
|
|
|
|
Nitrogen (N2) |
≤ 4.0 |
2.6 |
ppmv |
GC/PDID |
|
Oxygen (O2) |
≤ 1.0 |
0.3 |
ppmv
|
GC/PDID |
|
Carbon Monoxide (CO) |
≤ 1.0 |
0.2 |
ppmv
|
GC/PDID |
|
Carbon Dioxide (CO2) |
≤ 1.0 |
0.3 |
ppmv
|
GC/PDID |
|
Other Halocarbons (THC) |
≤ 1.0 |
≤ 1.0 |
ppmv
|
GC/PDID |
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