High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
Product Description:
Our SiC end effectors are designed for ultra-clean wafer handling in semiconductor manufacturing environments. Manufactured using high-purity silicon carbide, these forks provide exceptional thermal resistance, chemical stability, and mechanical strength—making them ideal for use in harsh process chambers such as etching, deposition, and high-temperature transport systems.
The dense, fine-grain SiC body ensures low particle generation, excellent dimensional stability, and compatibility with 200mm to 300mm wafers. Custom designs are available for specific robotic arms and wafer carriers.
Key Features:
- Material: High-purity Silicon Carbide (SiC)
- Excellent thermal resistance (up to 1600°C)
- Superior chemical and plasma corrosion resistance
- High mechanical strength and rigidity
- Low particle generation for cleanroom use
- Available for 4", 6", 8", and 12" wafer handling
- Custom shapes and slots for robotic compatibility
Product Specifications:
| Parameter | Specification |
|---|---|
| Material | High-purity SiC (≥99%) |
| Size | Customizable (for 4–12 inch wafers) |
| Surface Finish | Polished or matte per requirement |
| Thermal Resistance | Up to 1600°C |
| Chemical Resistance | Resistant to acids, bases, and plasma |
| Mechanical Strength | Flexural strength > 400 MPa |
| Cleanroom Grade | Suitable for Class 1–100 |
Keywords / Tags:
#SiCEndEffector #WaferHandling #SiCFork #SemiconductorEquipment #WaferTransfer #HighPuritySiC #SiCWaferCarrier #SemiconductorAutomation #VacuumCompatible #SiCComponent #EtchingToolPart #RoboticWaferHandling
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.