Water Cooling Turbomolecular High Vacuum Pump DFFZ250/2000PM-W 2000 L/S for Semiconductor
The DFFZ250/2000PM-W is a high-performance water-cooling turbomolecular vacuum pump engineered by BAOSI VACUUM for demanding industrial and scientific vacuum applications. Delivering 2000 L/s pumping speed with an ultimate pressure down to 6x10-7 Pa (CF flange), this pump combines grease-lubricated bearing technology with efficient water cooling for reliable long-term operation across semiconductor, coating, and research environments.
KEY FEATURES & BENEFITS- Grease-Lubricated Bearings — Extended service intervals and simplified maintenance compared to oil-circulation systems, reducing total cost of ownership
- Efficient Water Cooling — Maintains stable operating temperature even under high gas load conditions, ensuring consistent vacuum performance during prolonged runs
- Flexible Any-Angle Installation — Mounts in horizontal, vertical, or inverted orientation without performance loss, adapting to tight equipment layouts
- Rapid Run-Up Under 7 Minutes — Reaches full 24000 rpm operating speed quickly, minimizing system downtime between process cycles
- Low Vibration Below 0.15 μm — Critical for sensitive applications such as electron microscopy, mass spectrometry, and precision coating where mechanical stability is essential
| Model | DFFZ250/2000PM-W | ||
| Inlet flange | - | CF250 | LF250 |
| Outlet flange | - | KF40 | |
| Pumping speed | L/s | 2000 | |
| Compression ratio N2/H2 | - | 1×108/6×103 | |
| Ultimate pressure | Pa | 6×10-6 | 6×10-7 |
| Rotation speed | rpm | 24000 | |
| Run-up time | min | ＜7 | |
| Vibration | μm | ≤0.15 | |
| Forevacuum pump speed | L/s | 15 | |
| Cooling water temperature | ≤25 | ||
| Cooling water flow | L/s | ≥1 | |
| Max Power | W | ≤700 | |
| Voltage | V | 220 | |
| Installation direction | - | Any direction | |
| Weight | kg | 42kgs | |
ISO 9001 ISO 14001 OHSAS 18001
OUTSIDE DRAWING
Oil-lubricated turbomolecular pumps are widely applied in multiple industrial fields with their excellent vacuum performance, stable operation, and cost-effective characteristics. Their main application industries are as follows:
- Semiconductor & Microelectronics
- Vacuum Coating (PVD/CVD)
- Scientific Research & Laboratory Analysis
- Vacuum Heat Treatment & Metallurgy
- Optoelectronics & Laser Manufacturing
- Lithium Battery & New Energy Material Processing
- Analytical Instrumentation
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