Dry Vacuum Pump

Baosi water-cooled Dry Vacuum Pump GRM201, 200m³/h,≤0.5Pa,1.9kw Specifications Low power consumption, High pumping speed, Strong dust removal capacity, The ability to transport easily condensable process gases. The stable pumping speed makes it suitable for processes with large exhaust volumes, offering high reliability and low operating and maintenance costs. It is suitable for clean, moderate, and demanding processes such as PECVD, MOCVD, and SiC-CVD in industries like

BAOSI water-cooled Dry Vacuum Pump​ GRM601,600m³/h, ≤0.15Pa, 1.9+1.9kW Feature: Low power consumption, High pumping speed, Strong dust removal capacity, The ability to transport easily condensable process gases. The stable pumping speed makes it suitable for processes with large exhaust volumes, offering high reliability and low operating and maintenance costs. Utilizes a permanent magnet synchronous motor for lower energy consumption. Advanced rotor structure enhances the

BAOSI VACUUM DRY VACUUM PUMP GRM1200 Water-cooled,pumping speed 1200m³/h, 380V Feature: Utilizes a permanent magnet synchronous motor for lower energy consumption. Advanced rotor structure enhances the pump's dust removal capacity. Insensitive to dust and water vapor in the pumped gas; Compact structure, small overall size, and high system efficiency; Comprehensive protection functions and strong self-adaptability; Low vibration and noise during operation; an advanced lip

Roots Dry Vacuum Pump GRM4201-ETL with 4200m³/h pumping speed and ≤0.5Pa ultimate pressure. Water cooled, oil free design with permanent magnet synchronous motor and intelligent touch screen controller. ISO160 inlet, KF50 outlet. ETL certified.

GRM1201 multi-stage roots dry vacuum pump delivers 1200 m³/h with ultimate pressure ≤0.15 Pa. Features dual 1.9+1.9 kW permanent magnet motors, ISO160 inlet, and ultra-quiet ≤63 dB(A) operation for demanding semiconductor clean and medium processes.

GRM601 multi-stage roots dry vacuum pump delivers 600 m³/h pumping speed with ultimate pressure ≤0.15 Pa. Features dual 1.9+1.9 kW permanent magnet motors, multi-stage roots rotor design, and ultra-quiet ≤63 dB(A) operation for clean and medium semiconductor processes.

GRM201 multi-stage roots dry vacuum pump delivers 200 m³/h pumping speed with ultra-low noise ≤63 dB(A). Features permanent magnet synchronous motor (1.9 kW), multi-stage roots rotor design, and compact footprint ideal for clean and medium semiconductor processes.

GRH6001 dry claw vacuum pump delivers 6000 m³/h pumping speed with ultimate pressure ≤0.5 Pa. The largest GRH series model features 11+7.5 kW dual motor system, ISO250 inlet, and robust 846 kg construction for the most demanding large-scale industrial vacuum applications.

GRH1202 dry claw vacuum pump delivers 1200 m³/h pumping speed with ultimate pressure ≤0.5 Pa. Features permanent magnet synchronous motor for lower energy consumption, advanced claw rotor design with superior dust handling capability, and oil-free operation ideal for semiconductor, photovoltaic, and lithium battery industries.

Water Cooled Dry Vacuum Pump 1200m³/h ≤0.5Pa GRH1202 BSC DRY VACUUM PUMP GRH1202 - Water-cooled, pumping speed 1200m³/h, 380V Key Advantages Oil free vacuum - Critical for contamination-sensitive processes High reliability - Suitable for continuous industrial operation Handles condensable gases - Ideal for processes with steam/vapors Low maintenance - Cost-effective for long-term use Technical Parameters Parameter Unit GRH1202 Pumping speed m³/h 1200 Ultimate pressure Pa ≤0.5

GRH1802 dry claw vacuum pump delivers 1800 m³/h pumping speed with ultimate pressure ≤0.5 Pa. Features permanent magnet synchronous motor for lower energy consumption, advanced claw rotor design with superior dust handling capability, and oil-free operation ideal for semiconductor, photovoltaic, and lithium battery industries.

GRM4201 large multi-stage roots dry vacuum pump delivers 4200 m³/h pumping speed with 13+10 kW dual motor power. Designed for Load-Lock and Transfer chamber fast pump-down in heterojunction solar cell and lithium battery gigafactory applications.

GRH3001 dry claw vacuum pump delivers 3000 m³/h pumping speed with ultimate pressure ≤0.5 Pa. Features dual motor configuration (11+7.5 kW) with permanent magnet synchronous technology, oil-free claw mechanism, and advanced sealing system for semiconductor and industrial applications.