GRH1202 Dry Claw Vacuum Pump 1200 m³/h Oil-Free Industrial Vacuum Pump for Semiconductor CVD Process
Price:
Negotiable
MOQ:
1 Set
Delivery Time:
30-45 Working Days
Brand:
Baosi
Product Description
GRH1202 Dry Claw Vacuum Pump — 1200 m³/h Oil-Free Industrial Solution
The GRH1202 is a high-performance dry claw vacuum pump from the GRH series, designed for demanding semiconductor, photovoltaic, and lithium battery manufacturing processes. With a pumping speed of 1200 m³/h and ultimate pressure of ≤0.5 Pa, it delivers reliable oil-free vacuum without contamination risk.
Key Features
- Oil-Free Claw Mechanism: Pump chamber contains no oil or working medium, ensuring clean vacuum suitable for sensitive processes
- Permanent Magnet Synchronous Motor: Delivers lower energy consumption compared to conventional motors
- Advanced Rotor Design: Enhanced dust particle handling capability for harsh process environments
- Dust & Vapor Tolerant: Insensitive to dust and water vapor in pumped gases
- Compact Footprint: Space-saving design with high system integration (821 * 420 * 791 mm)
- Comprehensive Protection: Full protection functions with strong self-adaptive capability
- Low Vibration & Noise: ≤70 dB(A) during operation at ultimate pressure
- Advanced Sealing: Lip seal and labyrinth seal system combined with nitrogen purge prevents oil contamination
- Remote Control: I/O interface and RS485 (Modbus protocol) for remote monitoring and control
Technical Specifications
| Model | GRH1202 |
| Pumping Speed | 1200 m³/h |
| Ultimate Pressure | ≤0.5 Pa |
| Motor Power | 7.5 + 1.9 kW |
| Voltage | 380V (3-Phase) |
| Inlet Connection | ISO100 |
| Outlet Connection | KF40 |
| Noise Level | ≤70 dB(A) |
| Weight | 220 kg |
| Dimensions (L*W*H) | 821 * 420 * 791 mm |
| Cooling Water Pressure | 0.1–0.6 MPa |
| Cooling Water Flow | ≥4.7 L/min |
| N₂ Purge Pressure | 0.2–0.6 MPa |
| N₂ Purge Flow | 4–96 L/min |
| Operating Temperature | 5–40°C; ≤80% RH |
Applications
- Semiconductor: Etch, Ion Implantation, CVD, ALD, PECVD, MOCVD, SACVD, RTP, HDP-CVD
- Photovoltaic: Crystal growth furnaces, solar cell manufacturing
- Lithium Battery: Cell vacuum drying, electrolyte filling, degassing
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Company
Ningbo Baosi Energy Equipment Co., Ltd.
Location
No.55 ,Juchao Rd,Jiangkou Subdistrict,Fenghua District, Ningbo,Zhejiang,China.
Contact Person
Raeka