GRH1802 Dry Claw Vacuum Pump 1800 m³/h High-Speed Oil-Free Vacuum Pump for Semiconductor Manufacturing
Price:
USD 9500-13500/Set
MOQ:
1 Set
Delivery Time:
15-30 Working Days
Brand:
Baosi
Product Description
GRH1802 Dry Claw Vacuum Pump — 1800 m³/h Oil-Free Industrial Solution
The GRH1802 is a high-performance dry claw vacuum pump from the GRH series, delivering 1800 m³/h pumping speed with ultimate pressure ≤0.5 Pa. Its oil-free claw mechanism makes it ideal for semiconductor, photovoltaic, and lithium battery manufacturing processes that demand contamination-free vacuum environments.
Key Features
- Oil-Free Claw Mechanism: No oil or working medium in pump chamber — ensures process cleanliness
- Permanent Magnet Synchronous Motor: Superior energy efficiency for lower operating costs
- Advanced Rotor Design: Enhanced dust exhaust capability for harsh process conditions
- Dust & Vapor Insensitive: Handles dust and water vapor in pumped gases reliably
- Compact & Integrated: Space-efficient design (935 * 420 * 795 mm, 472 kg)
- Full Protection: Comprehensive protection with strong adaptive control
- Low Vibration & Noise: Below 70 dB(A) at ultimate pressure
- Advanced Sealing System: Lip seal + labyrinth seal + nitrogen purge for oil-free vacuum
- Remote Monitoring: I/O and RS485 (Modbus) interface for remote control
Technical Specifications
| Model | GRH1802 |
| Pumping Speed | 1800 m³/h |
| Ultimate Pressure | ≤0.5 Pa |
| Motor Power | 7.5 + 4.5 kW |
| Voltage | 380V (3-Phase) |
| Inlet Connection | ISO160 |
| Outlet Connection | KF40 |
| Noise Level | ＜70 dB(A) |
| Weight | 472 kg |
| Dimensions (L*W*H) | 935 * 420 * 795 mm |
| Cooling Water Pressure | 0.3–0.6 MPa |
| Cooling Water Flow | 6 L/min |
| N₂ Purge Pressure | 0.25–0.69 MPa |
| N₂ Purge Flow | 4–96 L/min |
| Operating Temperature | 5–40°C; ≤80% RH |
Applications
- Semiconductor: Etch, Ion Implantation, CVD (ALD, PECVD, MOCVD, SACVD, RTP, HDP-CVD)
- Photovoltaic: Crystal growth furnaces, solar cell fabrication
- Lithium Battery: Cell vacuum drying, electrolyte filling, degassing
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Get in Touch
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Company
Ningbo Baosi Energy Equipment Co., Ltd.
Location
No.55 ,Juchao Rd,Jiangkou Subdistrict,Fenghua District, Ningbo,Zhejiang,China.
Contact Person
Raeka