GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process
Price:
USD 12800-18500/Set
MOQ:
1 Set
Delivery Time:
20-35 Working Days
Brand:
Baosi
Product Description
GRH3001 Dry Claw Vacuum Pump 3000 m³/h High-Capacity Oil-Free Vacuum Pump for Semiconductor Industrial Process
GRH3001 Dry Claw Vacuum Pump — 3000 m³/h High-Capacity Oil-Free Solution
The GRH3001 is a high-capacity dry claw vacuum pump delivering 3000 m³/h pumping speed with ultimate pressure ≤0.5 Pa. With a powerful 11+7.5 kW dual motor configuration, it handles the most demanding semiconductor, photovoltaic, and lithium battery manufacturing processes while maintaining contamination-free operation.
Key Features
- High-Capacity Oil-Free Design: 3000 m³/h pumping speed with zero oil contamination risk
- Dual Motor System: 11+7.5 kW permanent magnet synchronous motors for maximum efficiency
- Advanced Claw Rotor: Superior dust handling and long service life in harsh environments
- Dust & Vapor Tolerant: Insensitive to particulates and water vapor in process gases
- Compact Integration: 922 * 516 * 988 mm footprint with 770 kg robust construction
- Comprehensive Protection: Full safety and monitoring features with adaptive control
- Low Noise Operation: ≤70 dB(A) for comfortable working environments
- Multi-Layer Sealing: Lip seal + labyrinth seal + nitrogen purge for guaranteed oil-free vacuum
- Smart Connectivity: I/O and RS485 (Modbus protocol) remote monitoring and control
Technical Specifications
| Model | GRH3001 |
|---|---|
| Pumping Speed | 3000 m³/h |
| Ultimate Pressure | ≤0.5 Pa |
| Motor Power | 11 + 7.5 kW |
| Voltage | 380V (3-Phase) |
| Inlet Connection | ISO160 |
| Outlet Connection | KF40 |
| Noise Level | ≤70 dB(A) |
| Weight | 770 kg |
| Dimensions (L*W*H) | 922 * 516 * 988 mm |
| Cooling Water Pressure | 0.1–0.6 MPa |
| Cooling Water Flow | 11 L/min |
| N₂ Purge Pressure | 0.2–0.6 MPa |
| N₂ Purge Flow | 43/97/123 L/min |
| Operating Temperature | 5–40°C; ≤90% RH |
Applications
- Semiconductor: Etch, Ion Implantation, CVD (ALD, LPCVD, PECVD, MOCVD, SACVD, RTP, HDP-CVD)
- Photovoltaic: Crystal growth, solar cell manufacturing processes
- Lithium Battery: Cell vacuum drying, electrolyte filling, degassing processes
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Get in Touch
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Company
Ningbo Baosi Energy Equipment Co., Ltd.
Location
No.55 ,Juchao Rd,Jiangkou Subdistrict,Fenghua District, Ningbo,Zhejiang,China.
Contact Person
Raeka