GRH6002 Dry Claw Vacuum Pump 6000 m³/h Ultra-High-Capacity Oil-Free Vacuum Pump for Semiconductor Process
Price:
Negotiable
MOQ:
1 Set
Delivery Time:
25-40 Working Days
Brand:
Baosi
Product Description
GRH6002 Dry Claw Vacuum Pump — 6000 m³/h Ultra-High-Capacity Solution
The GRH6001 is the flagship model of the GRH series, delivering an impressive 6000 m³/h pumping speed with ultimate pressure ≤0.5 Pa. Featuring an ISO250 inlet, 11+7.5 kW dual motor configuration, and robust 846 kg industrial construction, it is engineered for the most demanding large-scale semiconductor, photovoltaic, and lithium battery manufacturing facilities.
Key Features
- Ultra-High Capacity: 6000 m³/h pumping speed — the most powerful GRH series model
- Oil-Free Claw Technology: No oil contamination risk for sensitive semiconductor processes
- Dual Motor System: 11+7.5 kW permanent magnet synchronous motors
- ISO250 Large Inlet: Handles high-volume gas flow for large-scale production lines
- Superior Dust Handling: Advanced claw rotor design for harsh environments
- Industrial-Grade Build: 846 kg robust construction with 1076*516*988 mm footprint
- Low Noise: ≤70 dB(A) despite high pumping capacity
- Advanced Sealing: Triple-layer protection: lip seal + labyrinth + nitrogen purge
- Remote Intelligence: I/O + RS485 (Modbus) for full factory integration
Technical Specifications
| Model | GRH6002 |
| Pumping Speed | 6000 m³/h |
| Ultimate Pressure | ≤0.5 Pa |
| Motor Power | 11 + 7.5 kW |
| Voltage | 380V (3-Phase) |
| Inlet Connection | ISO250 |
| Outlet Connection | KF40 |
| Noise Level | ≤70 dB(A) |
| Weight | 846 kg |
| Dimensions (L*W*H) | 1076 * 516 * 988 mm |
| Cooling Water Pressure | 0.1–0.6 MPa |
| Cooling Water Flow | 11 L/min |
| N₂ Purge Pressure | 0.2–0.6 MPa |
| N₂ Purge Flow | 43/97/123 L/min |
| Operating Temperature | 5–40°C; ≤90% RH |
Applications
- Large-Scale Semiconductor: High-volume etch, ion implantation, CVD processes
- Photovoltaic Mega-Factories: Crystal growth and cell manufacturing at scale
- Lithium Battery Gigafactories: Cell drying, electrolyte filling, degassing
- Flat Panel Display Manufacturing: LCD, LED, OLED production lines
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Company
Ningbo Baosi Energy Equipment Co., Ltd.
Location
No.55 ,Juchao Rd,Jiangkou Subdistrict,Fenghua District, Ningbo,Zhejiang,China.
Contact Person
Raeka