GRM201 Multi-Stage Roots Dry Vacuum Pump 200 m³/h Oil-Free Compact Vacuum Pump for Semiconductor Clean Process
Price:
Negotiable
MOQ:
1 Set
Delivery Time:
15-25 Working Days
Brand:
Baosi
Product Description
GRM201 Multi-Stage Roots Dry Vacuum Pump — 200 m³/h Compact Oil-Free Solution
The GRM201 is a compact multi-stage roots dry vacuum pump delivering 200 m³/h pumping speed with an ultra-quiet operation at ≤63 dB(A). Its oil-free multi-stage roots design makes it ideal for clean and medium semiconductor processes, photovoltaic manufacturing, and lithium battery production lines that require contamination-free vacuum with minimal footprint.
Key Features
- Multi-Stage Roots Design: Low power consumption with high pumping efficiency
- Ultra-Quiet Operation: ≤63 dB(A) — the quietest in its class
- Oil-Free Mechanism: Pump chamber contains absolutely no oil for clean process compatibility
- Permanent Magnet Synchronous Motor: 1.9 kW with superior energy efficiency
- Superior Dust Handling: Advanced rotor structure for enhanced particle exhaust
- Compact Footprint: Only 741 * 344 * 466 mm, 150 kg — easy to integrate
- Dust & Vapor Tolerant: Insensitive to process byproducts and moisture
- Full Protection: Comprehensive safety features with adaptive capability
- Smart Control: I/O and RS485 (Modbus protocol) for remote monitoring
- Triple Sealing: Lip seal + labyrinth seal + nitrogen purge for guaranteed oil-free vacuum
Technical Specifications
| Model | GRM201 |
| Pumping Speed | 200 m³/h |
| Ultimate Pressure (w/o purge) | ≤0.5 Pa |
| Motor Power | 1.9 kW |
| Voltage | 380V (3-Phase) |
| Inlet Connection | ISO63 |
| Outlet Connection | KF25 |
| Noise Level | ≤63 dB(A) |
| Weight | 150 kg |
| Dimensions (L*W*H) | 741 * 344 * 466 mm |
| Cooling Water Pressure | 0.1–0.6 MPa |
| Cooling Water Flow | ≥3 L/min |
| N₂ Purge Pressure | 0.2–0.6 MPa |
| N₂ Purge Flow | 12–50 L/min |
| Operating Temperature | 5–40°C; ≤90% RH |
Applications
- Semiconductor Clean/Medium Processes: ALD, PECVD, MOCVD, SACVD, RTP, HDP-CVD
- Photovoltaic: Crystal growth furnaces, solar cell fabrication
- Lithium Battery: Cell vacuum drying, electrolyte filling, degassing
- R&D Laboratories: University and industrial research vacuum systems
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Company
Ningbo Baosi Energy Equipment Co., Ltd.
Location
No.55 ,Juchao Rd,Jiangkou Subdistrict,Fenghua District, Ningbo,Zhejiang,China.
Contact Person
Raeka