GRM602 Multi-Stage Roots Dry Vacuum Pump 600 m³/h Oil-Free Medium-Capacity Vacuum Pump for Semiconductor Process
Price:
Negotiable
MOQ:
1 Set
Delivery Time:
15-30 Working Days
Brand:
Baosi
Product Description
GRM602 Multi-Stage Roots Dry Vacuum Pump — 600 m³/h Medium-Capacity Solution
The GRM601 is a medium-capacity multi-stage roots dry vacuum pump delivering 600 m³/h pumping speed with an impressive ultimate pressure of ≤0.15 Pa. Its dual 1.9+1.9 kW permanent magnet synchronous motors provide reliable oil-free vacuum for semiconductor, photovoltaic, and lithium battery applications.
Key Features
- Multi-Stage Roots Design: High pumping speed with low power consumption
- Dual Motor Configuration: 1.9+1.9 kW for balanced, efficient operation
- Ultra-Low Ultimate Pressure: ≤0.15 Pa for demanding process requirements
- Ultra-Quiet: ≤63 dB(A) — ideal for cleanroom environments
- Oil-Free Mechanism: Zero oil contamination for sensitive processes
- Superior Particle Handling: Advanced rotor structure for dusty processes
- Compact Integration: 865 * 344 * 751 mm, 260 kg
- Dust & Vapor Insensitive: Reliable with process byproducts and moisture
- Advanced Sealing: Lip seal + labyrinth + nitrogen purge protection
- Remote Intelligence: I/O and RS485 (Modbus) for factory automation
Technical Specifications
| Model | GRM602 |
| Pumping Speed | 600 m³/h |
| Ultimate Pressure (w/o purge) | ≤0.15 Pa |
| Motor Power | 1.9 + 1.9 kW |
| Voltage | 380V (3-Phase) |
| Inlet Connection | ISO100 |
| Outlet Connection | KF25 |
| Noise Level | ≤63 dB(A) |
| Weight | 260 kg |
| Dimensions (L*W*H) | 865 * 344 * 751 mm |
| Cooling Water Pressure | 0.1–0.6 MPa |
| Cooling Water Flow | ≥4 L/min |
| N₂ Purge Pressure | 0.2–0.6 MPa |
| N₂ Purge Flow | 12–50 L/min |
| Operating Temperature | 5–40°C; ≤90% RH |
Applications
- Semiconductor: PECVD, MOCVD, SACVD, RTP, HDP-CVD, ALD, Metal Etch, Silicon Etch
- Photovoltaic: Crystal growth, solar cell manufacturing
- Lithium Battery: Cell drying, electrolyte filling, degassing
- Flat Panel Display: LED and LCD manufacturing processes
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Get in Touch
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Company
Ningbo Baosi Energy Equipment Co., Ltd.
Location
No.55 ,Juchao Rd,Jiangkou Subdistrict,Fenghua District, Ningbo,Zhejiang,China.
Contact Person
Raeka