GRM4201 Large Multi-Stage Roots Dry Vacuum Pump 4200 m³/h Oil-Free for Load-Lock Transfer
Price:
USD 22000-35000/Set
MOQ:
1 Set
Delivery Time:
30-45 Working Days
Brand:
Baosi
Product Description
GRM4201 Large Multi-Stage Roots Dry Vacuum Pump — 4200 m³/h High-Capacity Solution
The GRM4201 is a large-scale multi-stage roots dry vacuum pump specifically designed for Load-Lock chambers, transfer chambers, and fast pump-down applications. With 4200 m³/h pumping speed and 13+10 kW dual motor configuration, it meets the demands of heterojunction solar cell manufacturing and lithium battery gigafactories where rapid cycling and high vacuum integrity are critical.
Key Features
- Ultra-High Capacity: 4200 m³/h for rapid Load-Lock pump-down cycles
- Multi-Stage Roots + Booster: High vacuum with wide working pressure range
- Powerful Dual Motor: 13+10 kW permanent magnet synchronous motors
- Unique Rotor Design: Optimized for low energy consumption with high efficiency
- Oil-Free Clean Vacuum: No oil contamination — ideal for semiconductor and solar
- Precision Manufacturing: Advanced CNC-machined rotors with full interchangeability
- Dual-End Bearing Support: Ultra-reliable rotor support with minimal vibration
- Superior Start-Up Reliability: Engineered for demanding process cycling
- Advanced Sealing: Lip seal + labyrinth oil barrier + nitrogen purge — truly oil-free
- Water-Cooled Sealed Motor: Eliminates oil leak risk, extends service life
- Intelligent Control: One-touch start/stop with I/O and RS485 (Modbus-RTU)
Technical Specifications
| Model | GRM4201 |
| Pumping Speed | 4200 m³/h |
| Ultimate Pressure (w/o purge) | ≤0.5 Pa |
| Motor Power | 13 + 10 kW |
| Voltage | 380V (3-Phase) |
| Inlet Connection | ISO160 |
| Outlet Connection | KF50 |
| Noise Level (with silencer) | ≤75 dB(A) |
| Weight | 1400 kg (main pump) |
| Dimensions — Main Pump (L*W*H) | 1695 * 600 * 1450 mm |
| Dimensions — Booster (L*W*H) | 295 * 600 * 1450 mm |
| Cooling Water Pressure | 0.1–0.7 MPa |
| Cooling Water Flow | 8–10 L/min |
| N₂ Purge Pressure | 0.2–0.5 MPa |
| N₂ Purge Flow | 0–120 L/min |
| Operating Temperature | 5–40°C; ≤80% RH |
Applications
- Semiconductor Manufacturing: Load-Lock chambers, transfer modules, process interfaces
- Heterojunction (HJT) Solar Cell: PECVD vacuum, rapid pump-down
- Lithium Battery Gigafactories: High-volume cell drying and vacuum processing
- Vacuum Coating: Load-Lock for substrate transfer while maintaining chamber vacuum
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Ningbo Baosi Energy Equipment Co., Ltd.
Location
No.55 ,Juchao Rd,Jiangkou Subdistrict,Fenghua District, Ningbo,Zhejiang,China.
Contact Person
Raeka