BAOSI water-cooled Dry Vacuum Pump​ GRM601,600m³/h, ≤0.15Pa, 1.9+1.9kW

Feature:

• Low power consumption,
• High pumping speed,
• Strong dust removal capacity,
• The ability to transport easily condensable process gases.
• The stable pumping speed makes it suitable for processes with large exhaust volumes, offering high reliability and low operating and maintenance costs. 

• Utilizes a permanent magnet synchronous motor for lower energy consumption.
• Advanced rotor structure enhances the pump's dust removal capacity.
• Insensitive to dust and water vapor in the pumped gas;
• Compact structure, small overall size, and high system efficiency;
• Comprehensive protection functions and strong self-adaptability;
• Low vibration and noise during operation; an advanced lip seal and labyrinth seal system, combined with nitrogen purging, effectively ensures an oil-free pump chamber, improving the vacuum cleanliness of the process chamber.
• Remote control and monitoring functions are possible via the I/O interface and RS-485 interface (Moudbus protocol).

TECHNICAL PARAMETER

Pumping Curve

OUTLINE DIMENSIONAL DRAWING 

Application :

• In the semiconductor industry, clean, moderate, and harsh processes include etching, ion implantation, and CVD.
• In the photovoltaic industry, be wary of growth furnaces and cell fabrication processes.
• In the lithium-ion battery industry, processes such as vacuum drying, electrolyte filling, and degassing of battery cells are crucial.