Baosi water-cooled Dry Vacuum Pump GRM201, 200m³/h,≤0.5Pa,1.9kw

Specifications

• Low power consumption,
• High pumping speed,
• Strong dust removal capacity,
• The ability to transport easily condensable process gases.

The stable pumping speed makes it suitable for processes with large exhaust volumes, offering high reliability and low operating and maintenance costs. It is suitable for clean, moderate, and demanding processes such as PECVD, MOCVD, and SiC-CVD in industries like photovoltaics and semiconductors.
 

Product Features

• Utilizes a permanent magnet synchronous motor for lower energy consumption.
• Advanced rotor structure enhances the pump's dust removal capacity.
• Insensitive to dust and water vapor in the pumped gas;
• Compact structure, small overall size, and high system efficiency;
• Comprehensive protection functions and strong self-adaptability;
• Low vibration and noise during operation; an advanced lip seal and labyrinth seal system, combined with nitrogen purging, effectively ensures an oil-free pump chamber, improving the vacuum cleanliness of the process chamber.
• Remote control and monitoring functions are possible via the I/O interface and RS-485 interface (Moudbus protocol).

TECHNICAL PARAMETER

Pumping Curve

Drawing 

Applications :

It is suitable for clean, moderate, and demanding processes such as PECVD, MOCVD, and SiC-CVD in industries like photovoltaics and semiconductors.