Grease Lubrication Turbomolecular Pump Compact Structure For System Integration
Turbo Molecular Pump , FF-100/150E , Water cooling , Grease lubrication , Instrumental
Series molecular pumps for instruments developed by KYKY for the instrument industry are compact high-performance types. It can perfectly meet the challenging requirements in instrument field; due to higher rotating speed and more optimal extracting structure, It is compatible with multiple backing pumps, and has stronger pumping capability for small molecular gases.
Advantages:
Compact structure for system integration
Module design for more selections
Higher fore-pressure tolerance
Any mounting position
Adjustable rotating speed
Application:
Series molecular pumps for instruments are suitable choices for high-vacuum generation equipment in fields of mass spectrometry, surface analysis and other scientific researches. Corrosion resistant molecular pumps for instruments can be applied to the processes which corrosive gases involved, such as in coating film and etching industries.
| Flange(In) | ISO-K/CF100 |
| Flange(Out) KF | DN25 |
| Pumping Speed( L/s) | N2:140 |
| He:130 | |
| H2:75 | |
| Ar:145 | |
| Compression Ratio | N2:107 |
| He:103 | |
| H2:103 | |
| Ar:107 | |
| Ultimated Pressure(Pa) | CF:2×10-7 |
| ISO-K:2×10-6 | |
| Max. Continuous Fore-vacuum pressure(Pa) | 220 |
| Max. Fore-vacuum Pressure | N2:500 |
| Gas Throughout (sccm) | N2:135 |
| He:80 | |
| H2:52 | |
| Ar:143 | |
| Rotation Speed ( rpm) | 51000 |
| Run-Up Time(min) | ≤3 |
| Cooling Type,Standard | Water |
| Cooling Water Consumption ( L/min) | 1 |
| Cooling Water Temperature(℃) | ≤25 |
| Power Connection:Voltage (V AC) | DC24/AC220 |
| Max.Power Consumption (W) | 90 |
| Controller Model | TD-150/TCP-100/TC-100 |
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