Turbomolecular Pump

Maglev Pump , CXF-320/3001E , Water cooling , ISO-F , On board The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation. The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force. Series magnetically levitated molecular pumps are

Water Cooling Maglev Lubrication Turbomolecular Pump CE The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force. Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments. Technologies: Control Technology for Magnetic Bearing:

Turbo Molecular Pump , FF-160/700N , Anti-corrosion , Pumping 700L/s N2 The N-series turbo pumps are innovated on the basis of the conventional turbo pump. The main improvement is the nickel plating of the core components and the installation of the purging device, which make the N-series pumps are well suited for applications in corrosive environments. Advantages: Because of the anti- corrosion feature, the pump has stable performance and long service life. In Structure, it

Turbo Molecular Pump , FF-40/25E , Air cooling , Grease lubrication , Instrumental The smallest turbomolecular pump of KYKY pumps Series molecular pumps for instruments developed by KYKY for the instrument industry are compact high-performance types. Practices show that serial molecular pumps for instruments can perfectly meet the challenging requirements in instrument field; due to higher rotating speed and more optimal extracting structure, the molecular pumps are

Turbo Molecular Pump , FF-100/300E , Air cooling , Grease lubrication , Instrumental Series molecular pumps for instruments developed by KYKY for the instrument industry are compact high-performance types. It can perfectly meet the challenging requirements in instrument field; due to higher rotating speed and more optimal extracting structure, It is compatible with multiple backing pumps, and has stronger pumping capability for small molecular gases. Advantages: This Series

Maglev Pump , CXF-200/1401 , Water cooling , On board The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation. The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force. Series magnetically levitated molecular pumps are vacuum

Maglev Pump , CXF-200/1401 , Water cooling , On board series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, cvd, pvd and ion implantation and gases easily coagulated at normal temperature. The advantages: 1. Zero friction during operation, and low power consumption 2. Easy to acquire really clean

Maglev Pump , CXF-200/1401 , Water cooling , On board The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation. Technologies: Control Technology for Magnetic Bearing: The adopted electromagnetic is a 5-axis magnetically levitated. This design can have dynamic response and timely adjustment

Maglev Pump , CXF-200/1401 , Water cooling , On board The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation. The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force. Series magnetically levitated molecular pumps are vacuum

Water Cooling Maglev Lubrication Turbomolecular Pump CE The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force. Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments. Technologies: Control Technology for Magnetic Bearing:

Water Cooling Maglev Lubrication Turbomolecular Pump CE Technologies: Control Technology for Magnetic Bearing: The adopted electromagnetic is a 5-axis magnetically levitated. This design can have dynamic response and timely adjustment by means of dynamic active closed-circuit magnetic suspension control technology based on advanced international control theory, so as to guarantee such significant advantages of the high-speed shafting as stable levitated and reliable operation

Maglev Pump , CXF-200/1401 , Water cooling , On board The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation. The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force. Series magnetically levitated molecular pumps are vacuum

Maglev Pump , CXF-200/1401 , Water cooling , On board The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation. The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force. Series magnetically levitated molecular pumps are vacuum

Maglev Pump , CXF-200/1401 , Water cooling , On board The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation. The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force. Series magnetically levitated molecular pumps are vacuum

Turbo Molecular Pump , F-400/4500 , Large pumping speed, Water cooling , Oil lubrication KYKY developed the newest oil lubrication turbo pumps of convenient operation, flexible installation, wide application range and stable performance. pumping capacity is 4500 L/s ( N2). Specifications: Flange(In) DN400 ISO-K Gas Throughout (sccm) N2:5500 Flange(Out) KF DN100 He:4000 Pumping Speed( L/s) N2:4500 H2:3200 He:3200 Ar:2100 H2:2000 Rotation Speed ( rpm) 15300 Ar:4200 Run-Up Time

Maglev Pump, CXF-250/2301, ISO-K/CF , Water cooling On Board The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force, meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments. Technologies: Control Technology for Magnetic Bearing: a 5-axis magnetically levitated, based on advanced international control theory, to guarantee

Turbo Molecular Pump , FF-100/150E , Air cooling , Grease lubrication , Instrumental Series molecular pumps for instruments developed by KYKY for the instrument industry are compact high-performance types. It can perfectly meet the challenging requirements in instrument field; due to higher rotating speed and more optimal extracting structure, It is compatible with multiple backing pumps, and has stronger pumping capability for small molecular gases. Advantages: Compact

Turbo Molecular Pump , FF-63/80E , Wate cooling , Grease lubrication , Instrumental Series molecular pumps for instruments developed by KYKY for the instrument industry are compact high-performance types. It can perfectly meet the challenging requirements in instrument field; due to higher rotating speed and more optimal extracting structure, It is compatible with multiple backing pumps, and has stronger pumping capability for small molecular gases. Advantages: 1. Compact

Turbo Molecular Pump , FF-160/700FE , Air cooling, Grease lubrication KYKY independently developed grease lubrication turbo pumps as a series of high-performance molecular pumps, The grease-lubrication pump is equipped with ceramic bearing, which is usually of a self-sealed structure, consisting of a bearing inner ring, a bearing outer ring, balls, holders, a sealing end cover and lubricating grease. Shafting support structure applied to the grease-lubricated ceramic bearing

Turbo Molecular Pump , FF-100/300E , Water cooling , Grease lubrication , Instrumental Series molecular pumps for instruments developed by KYKY for the instrument industry are compact high-performance types. It can perfectly meet the challenging requirements in instrument field; due to higher rotating speed and more optimal extracting structure, It is compatible with multiple backing pumps, and has stronger pumping capability for small molecular gases. Advantages: 1. Compact