Instrumental Turbopumps And Pumping Systems Adjustable Rotating Speed
Turbo Molecular Pump , FF-63/80E , Air cooling , Grease lubrication , Instrumental
In order to meet the requirements in instruments industry, KYKY developed Series molecular pumps for instruments as the compact high-performance types. It can perfectly meet the challenging requirements in instrument field; due to higher rotating speed and more optimal extracting structure, It is compatible with multiple backing pumps, and has stronger pumping capability for small molecular gases.
Advantages:
This series pumps has such advantages as Compact structure for system integration, Module design for more selections, Higher fore-pressure tolerance, Any mounting position and Adjustable rotating speed.
Applications:
Series molecular pumps for instruments are suitable choices for high-vacuum generation equipment in fields , such as mass spectrometry, surface analysis and other scientific researches.
Corrosion resistant molecular pumps for instruments can be applied to the processes which corrosive gases involved, such as in coating film and etching industries.
| Flange(In) | ISO-K/CF 63 |
| Flange(Out) KF | DN16 |
| Pumping Speed( L/s) | N2:62 |
| He:55 | |
| H2:34 | |
| Ar:65 | |
| Compression Ratio | N2:109 |
| He:105 | |
| H2:104 | |
| Ar:109 | |
| Ultimated Pressure(Pa) | CF:5×10-6 |
| ISO-K:3×10-5 | |
| Max. Continuous Fore-vacuum pressure(Pa) | 500 |
| Max. Fore-vacuum Pressure | N2:1500 |
| Gas Throughout (sccm) | N2:35 |
| He:30 | |
| H2:19 | |
| Ar:38 | |
| Rotation Speed ( rpm) | 72000 |
| Run-Up Time(min) | ≤2 |
| Cooling Type,Standard | Air |
| Cooling Water Consumption ( L/min) | 1 |
| Cooling Water Temperature(℃) | ≤25 |
| Power Connection:Voltage (V AC) | DC24/AC220 |
| Max.Power Consumption (W) | 90 |
| Controller Model | TD-80/TCP-100/TC-100 |
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