High Temperature - Proof Molecular Vacuum Pump For Ion Implantation Industry
Price:
upon request
MOQ:
1
Delivery Time:
5-8weeks
Brand:
KYKY
Product Description
Turbo Molecular Pump , FF-160/620N , Anti-corrosion , Pumping 600L/s N2
The N-series turbo pumps are innovated on the basis of the conventional turbo pump. The main improvement is the nickel plating of the core components and the installation of the purging device, which make the N-series pumps are well suited for applications in corrosive environments.
Advantages:
| 1 | Anti corrosive plating |
| 2 | Stable performance |
| 3 | Long service life |
| Simple maintenance | |
| 4 | Convenient operation |
| 5 | Available for harsh operating environment (high temperature, dust, strong corrosion, etc.) |
Application:
| Industrial leak detection | Low-E glass | Optical coating |
| PVD | ITO glass | Solar cells |
| CVD | Electron beam welding | Vacuum furnaces |
| Ion implantation | vacuum electronic components manufacturing |
Specifications:
| Flange(In) | DN160 CF/ISO-K |
| Flange(Out) KF | DN40 |
| Pumping Speed( L/s) | N2:600 |
| He:380 | |
| H2:240 | |
| Ar:580 | |
| Compression Ratio | N2:109 |
| He:104 | |
| H2:103 | |
| Ar:109 | |
| Ultimated Pressure(Pa) | CF:6×10-7 |
| ISO-K:6×10-6 | |
| Max. Continuous Fore-vacuum pressure(Pa) | 240 |
| Max. Fore-vacuum Pressure | N2:350 |
| Gas Throughout (sccm) | N2:1200 |
| He:880 | |
| H2:700 | |
| Ar:450 | |
| Rotation Speed ( rpm) | 27000 |
| Run-Up Time(min) | ≤7 |
| Cooling Type,Standard | Water |
| Cooling Water Consumption ( L/min) | ≥1 |
| Cooling Water Temperature(℃) | ≤25 |
| Power Connection:Voltage (V AC) | 220±22 |
| Max.Power Consumption (W) | ≤500 |
| Controller Model | TCDP-II with 2.5 metet cable |
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
KYKY TECHNOLOGY CO., LTD.
Location
No. 13 Zhongguancun Bei er tiao, Haidian District, Beijing,100190
Contact Person
Shawn Liu