High Temperature Turbopumps And Pumping Systems Long Service Life For ITO Glass Industry
Turbo Molecular Pump , FF-160/700N , Anti-corrosion , Pumping 700L/s N2
The N-series turbo pumps are innovated on the basis of the conventional turbo pump. The main improvement is the nickel plating of the core components and the installation of the purging device, which make the N-series pumps are well suited for applications in corrosive environments.
Advantages:
Because of the anti- corrosion feature, the pump has stable performance and long service life.
In Structure, it is simple for maintenance and convenient for operation.
Anit corrosive surface treatment, nickel plating makes the pump available in harsh operating environment (high temperature, dust, strong corrosion, etc.)
Applications:
N-series turbo pumps are mainly used in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, Low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnaces and other industries.
Specifications:
| Flange(In) | DN160 CF/ISO-K |
| Flange(Out) KF | DN40 |
| Pumping Speed( L/s) | N2:700 |
| He:580 | |
| H2:260 | |
| Ar:680 | |
| Compression Ratio | N2:109 |
| He:107 | |
| H2:106 | |
| Ar:109 | |
| Ultimated Pressure(Pa) | CF:6×10-8 |
| ISO-K:6×10-7 | |
| Max. Continuous Fore-vacuum pressure(Pa) | 300 |
| Max. Fore-vacuum Pressure | N2:550 |
| Gas Throughout (sccm) | N2:1400 |
| He:1000 | |
| H2:800 | |
| Ar:550 | |
| Rotation Speed ( rpm) | 36000 |
| Run-Up Time(min) | ≤7 |
| Cooling Type,Standard | Water |
| Cooling Water Consumption ( L/min) | ≥1 |
| Cooling Water Temperature(℃) | ≤25 |
| Power Connection:Voltage (V AC) | 220±22 |
| Max.Power Consumption (W) | ≤500 |
| Controller Model | TCDP-II with 2.5 metet cable |
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