Environmental Friendly Turbo Pump Station Ultimate Vacuum ≤ 9E-5Pa Easy Operation
Pump station FJ-110, Water cooling , Ultimate vacuum (no load): ≤ 9E-5Pa
FJ-110 Sandard Turbo Molecular Pump Unit is an cleaning equipment to obtain high vacuum.
Such equipment is a vacuum obtaining system adopting the principle of vacuum, and consists of mechanical pump and molecular pump. It is featured by quick starting, high vacuum, few oil pollution, easy operation and etc and widely used in the fields of surface analysis, accelerator technology ,plasma technology, electric vacuum device manufacturing and other vacuum areas. The equipment is specifically composed of non-standard frame, mechanical pump and pipelines , electrical control systems, water cooling protection control and etc
Main parameters:
Ultimate vacuum (no load): ≤ 9×10-5Pa
Leaking rate of vacuum system: ≤ 5×10-9Pa·M3/S
Power supply voltage:220V±10/50Hz
Cooling method: water
Ambient temperature for equipment utilization:5-40℃
Ambient humidity for equipment utilization: ≤ 80%
Configuration:
| Name | Number |
| F-100/110 molecular pump and power supply (CF) | 1 |
| RVP-4 backing pump | 1 |
| Control power supply | 1 |
| Frame | 1 |
| CF100/ CF35/CF35 transition chamber | 1 |
| CD-35F manual isolation valve | 1 |
| ZDF-11A2 combination vacuum gauge | 1 |
| Other attachments |
Specification:
| Unit | FJ-110 | |
| Flange(In) | DN100CF | |
| DN100 ISO-K | ||
| Flange(Out) | ISO-KF | DN25 |
| Pumping Speed | l/s | N2:110 |
| He:100 | ||
| H2:50 | ||
| Ar:100 | ||
| Compression Ratio | N2:108 | |
| He:102 | ||
| H2:102 | ||
| Ar:108 | ||
| Ultimate Pressure | Pa | CF:6×10-7 |
| ISO-K:6×10-6 | ||
| recommended forevacuum pressure | Pa | 100 |
| forevacuum pump | RVD-4(default) | |
| Cooling Type,Standard | Air | |
| Cooling Water Consumpyion | L/min | >1 |
| Cooling Water Temperature | ℃ | ≤25 |
| Input voltage/ frequency | V/Hz | 220±22/50 |
| Environment temperature (℃) | Water cooling | 5℃-40℃ |
| mounting position | Vertical | |
| Controller Model | FD-110B | |
| L*W*H | mm | 500×510×840 |
| Weight | kg | 52 |
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