33000rpm Water Cooling Turbomolecular Pump with 1401L/s Pumping Speed for Industrial Plating
Price:
Negotiable
MOQ:
1
Delivery Time:
4weeks
Brand:
KYKY
Product Description
33000rpm Water Cooling Turbomolecular Pump For Industrial Plating
Product Overview
Maglev Pump, CXF-200/1401, Water cooling, On board
The electromagnetic bearing, also called "active magnetic levitated bearings," consists of a magnetic bearing, sensor, and control system. This design provides dynamic response and timely adjustment, ensuring high-speed shafting and reliable operation.
Magnetically levitated molecular pumps feature shafting supported by magnetic force. This series of pumps was developed by KYKY to meet application requirements in modern semiconductor manufacturing, chip manufacturing, industrial plating, and scientific instruments.
Advanced Technologies
- Control Technology for Magnetic Bearing: Features a 5-axis magnetically levitated design with dynamic active closed-circuit magnetic suspension control technology for stable levitation and reliable high-speed shafting operation.
- Motor Drive Control Technology: Utilizes high-efficiency high-speed DC motor and servo control system for maximum energy efficiency, automatic shafting speed compensation, stable startup, and reliable operation.
- Carbon Fiber Composite Rotor Technology: Turbo rotors made from high-strength aluminum alloy and lightweight carbon fiber composite, offering reduced weight and improved strength for high rotating speed, performance, and reliability.
- Corrosion Resisting Technology: Chamber parts treated with special processes to resist corrosive gases in semiconductor manufacturing, with inert gas protection for low vacuum parts enabling stable long-term corrosive gas extraction.
- Heating Temperature Control System: Equipped with electric heater and temperature controller to monitor and control cooling water, air-borne heating, electric heating, and protective gas heat, maintaining optimal temperature for special processes like etching.
Key Advantages
- Zero friction during operation with low power consumption
- Easy acquisition of clean high vacuum and ultrahigh vacuum without pump lubrication
- Capable of long-term corrosive gas extraction
- High safety and long service life with precision ceramic ball bearing protection
- Power generating function during sudden power-off situations
Technical Specifications
| Model | CXF-200/1401 |
|---|---|
| Pump Speed (l/s, Air) | 1400 |
| Compression Ratio | >1×10⁷ |
| Ultimate Vacuum (Pa) | ≤2×10⁻⁶ |
| Inlet Flange | DN200 ISO K(LF) DN200 ISO F DN200 ISO CF |
| Outlet Flange | KF 40 |
| Rotation Speed (rpm) | 33000 |
| Run-up Time (min) | 6 |
| VIB (mm) | <0.05 |
| Backing Pump (L/s) | 15 |
| Mounting Orientation | Any |
| Cooling Method | Water |
| Weight (kg) (With Controller) | 51 |
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
KYKY TECHNOLOGY CO., LTD.
Location
No. 13 Zhongguancun Bei er tiao, Haidian District, Beijing,100190
Contact Person
Shawn Liu