High Purity Titanium Sputtering Target ASTM B348
High Purity Titanium Sputtering Target ASTM B348
This high purity titanium sputtering target is produced from Grade 1, Grade 2, Grade 5, Grade 7 and Grade 12 titanium with a titanium content of 99.5% minimum and impurity content below 0.04%. Targets are forged and CNC machined to ASTM B348 and ASTM B381 with a density of 4.51 or 4.50 g/cm3, and alloy targets such as Ti-Al, Ti-Cr and Ti-Zr as well as chrome, zirconium, copper and tungsten can also be supplied.
Technical Specifications
| Product Type | Titanium sputtering target |
| Material | Pure titanium and titanium alloy (Gr1, Gr2, Gr5, Gr7, Gr12) |
| Titanium Content | 99.5% min |
| Impurity Content | Below 0.04% |
| Density | 4.51 or 4.50 g/cm3 |
| Standard | ASTM B348, ASTM B381 |
| Technique | Forged and CNC machined |
| Application | Semiconductor separation, film coating, storage electrode coating, sputtering coating, surface coating, glass coating |
Available Target Shapes and Sizes
| Target Shape | Size Range | Thickness |
| Round target | Diameter 30 - 2000mm | 3.0mm - 300mm |
| Plate target | Length 200 - 500mm, width 100 - 230mm | 3mm - 40mm |
| Tube target | Diameter 30 - 200mm, length 500 - 2000mm | 5mm - 20mm |
| Customized | Available on request | on request |
Applications & Titanium Advantages
Titanium sputtering targets are used in semiconductor separation, film coating, storage electrode coating, sputtering coating, surface coating and the glass coating industry. Purity strongly influences the performance of the sputtered film, because higher purity gives better corrosion resistance and better electrical and optical properties. Impurities in the solid target, together with oxygen and water vapour trapped in pores, are the main sources of film contamination, and density affects both the sputtering rate and the electrical and optical quality of the film. A fine and uniformly distributed grain structure sputters faster and produces a more even film thickness.
Quality, Customization & Inquiry
Targets are forged and CNC machined under ISO9001 quality control and packed in vacuum plastic bags with foam and pearl cotton inside a fumigation-free plywood case to meet international transport standards. Shape, size, grade and quantity can be customized, monthly capacity reaches 5000 pieces and delivery normally takes 15-20 days. Please send your target shape, dimensions, purity requirement and quantity so that we can prepare a quotation.
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.