Titanium Sputtering Target for PVD Coating
Titanium Sputtering Target for PVD Coating
This titanium sputtering target is made from titanium metal and used to deposit titanium films by sputtering. It is produced by vacuum melting and casting, or by powder metallurgy with isostatic pressing and high-temperature sintering, in grades Gr1, Gr2, Gr5, Gr7 and Gr12 as well as alloy targets such as Ti-Al, Ti-Cr and Ti-Zr. The targets are forged and CNC machined with a density of 4.51 g/cm3 and a titanium content of 99.5% min, and are used in PVD coating, semiconductor, glass coating and surface coating processes.
Technical Specifications
| Product name | Titanium sputtering target |
| Grade | Gr1, Gr2, Gr5, Gr7, Gr12; alloy targets Ti-Al, Ti-Cr, Ti-Zr |
| Titanium Content | 99.5% min (pure titanium Gr1, Gr2: purity 99.6% min) |
| Impurity Content | Less than 0.04% |
| Density | 4.51 g/cm3 |
| Standard | ASTM B348, ASTM B381 |
| Technique | Forged and CNC machined |
| Color | Silver |
Available Target Sizes
| Shape | Size Range |
|---|---|
| Round target | Ø30 - 2000 mm, thickness 3.0 - 300 mm |
| Plate target | Length 200 - 500 mm, width 100 - 230 mm, thickness 3 - 40 mm |
| Tube target | Dia 30 - 200 mm, thickness 5 - 20 mm, length 500 - 2000 mm |
| Custom sizes | Available on request |
Target Types and Applications
| Target Type | Typical Use |
|---|---|
| Pure titanium target | Hardware, decoration, tools, ceramics, golf and other coating industries |
| Alloy target (Ti-Al, Ti-Cr, Ti-Zr) | Film coating and surface coating, made to different proportions on request |
| Sputtering coating | Semiconductor separation, storage electrode coating and glass coating industry |
Applications & Titanium Advantages
Titanium sputtering targets are used for sputtering coating, surface coating and glass coating, and in the semiconductor, decoration, tool and ceramics industries. Titanium offers high purity, good corrosion resistance and stable film quality, so the deposited films are uniform and durable in demanding coating processes.
Quality, Customization & Inquiry
LHTi produces these targets to ASTM B348 and ASTM B381 and can supply alloy targets in different proportions to suit customer needs. Samples are available, and goods are packed in seaworthy shipment materials or as required by the buyer. Please send your drawing or specification for a quotation.
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.