Ta Sputtering Titanium Target Sheet 99.95% Purity Semiconductor Optical Coatings
99.95% purity Ta Sputtering target sheet for semiconductor coatings and optical coatings
1.
Uses: mainly used in semiconductor coatings and optical coatings.
Purity: 99.95% -99.99%.
Specification: square target, thickness x width x length = 5 ～ 25x≤800x≤2000 (mm)
Grain size: Recrystallization degree ≥98%, average grain size <100μm, uniform grain distribution, no delamination. According to the special requirements of users, the grain size> 100μm or <50μm can be met.
Flatness ≤0.2mm.
Surface roughness <1.6μm.
Other properties:
Metal element content table (GDMS) unit (ppm)
| element | content | element | content | element | content |
| Al | ≤0.2 | Ga | ≤1.0 | Pb | ≤1.0 |
| Ag | ≤1.0 | Ge | ≤1.0 | S | ≤0.2 |
| Au | ≤1.0 | Hf | ≤1.0 | Si | ≤0.2 |
| B | ≤0.1 | K | ≤0.05 | Sn | ≤0.1 |
| Bi | ≤1.0 | Li | ≤0.1 | Th | ≤0.005 |
| Ca | ≤0.1 | Mg | ≤0.1 | Ti | ≤1.0 |
| Cd | ≤1.0 | Mn | ≤0.1 | V | ≤0.2 |
| Cl | ≤1.0 | Mo | ≤5.0 | W | ≤70 |
| Co | ≤0.05 | Na | ≤0.1 | Zn | ≤1.0 |
| Cr | ≤0.25 | Nb | ≤75 | Zr | ≤0.2 |
| Cu | ≤0.75 | Ni | ≤0.25 | Y | ≤1.0 |
| Fe | ≤0.4 | P | ≤1.0 | U | 0.005 |
| Ta | Bal |
Gas element content table (LECO) unit (ppm)
| element | content | element | content | element | content |
| C | ≤40 | N | ≤25 | H | ≤2 |
| O | ≤100 |
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2.Image
3.Factory & Certificate
4.Package & Delivery
package:
Wrap the target material with pearl cotton and put it in a wooden box. Our reasonable packaging method can avoid the target materials from colliding with each other during transportation, and can also prevent the impact of external goods on the product, and ensure that the product is delivered after delivery Integrity.
---1. The sealed packaging,then put in the Carton cas or standard standard plywood case.
---2.Using exclusive custom carton with customer logo, each individual packaging, to help buyers direct sales.
---Accept customer requirment
Make sure that each package is tailor-made for you.ensure when you get the goods no damaged.
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